Realization of optical superlens imaging below the diffraction limit

Lee, Hyesog; Xiong, Yi; Fang, Nicholas X.; Srituravanich, Werayut; Durant, Stéphane; Ambati, Muralidhar; Sun, Cheng; Zhang, Xiang

doi:10.1088/1367-2630/7/1/255

Cited by 116 publications

(93 citation statements)

References 29 publications

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“…The reader may note, however, that such explanations did not go uncontested in literature [65]. On the other hand, as mentioned above, Fang et al [60] and, subsequently, Lee et al [66] experimentally demonstrated a spatial resolution of 89 nm and 60 nm, respectively, at a wavelength of 365 nm using a 35 nm-thick silver slab and achieving a wavelength/resolution ratio of 6. This was later overcome by a SiC lens that reached a factor of 20 due to smaller losses [67].…”

Section: Negative Refraction and Sub-wavelength Resolution Imaging Anmentioning

confidence: 97%

3D THz metamaterials from micro/nanomanufacturing

Moser

Rockstuhl

2011

Laser & Photonics Reviews

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Metamaterials are engineered composite materials offering unprecedented control of wave propagation. Despite their complexity, effective properties can frequently be extracted by conceptualizing them as homogeneous and isotropic media with dispersive electric permittivity and magnetic permeability. For an ideal isotropic medium, strong dispersion in these properties causes wave and field vectors to form a left-handed (E,H,k)-frame involving backward waves, and offering control of quantities like the refractive index which may become negative. Experimental evidence exists from microwaves to the visible. Applications include sub-wavelength-resolution imaging, invisibility cloaking, plasmonics-based lasers, metananocircuits, and omnidirectional absorbers. As the engineered sub-structures must be smaller than their design wavelength, micro/nanomanufacturing is exploited from primary pattern generation over lithography to templating and molecular beam epitaxy. 3D metamaterials have been made by stacking of layers, multilayer structuring, and 3D primary pattern generation. Theory shows that full properties may build up over one or a very few layers.

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Section: Negative Refraction and Sub-wavelength Resolution Imaging Anmentioning

confidence: 97%

3D THz metamaterials from micro/nanomanufacturing

Moser

Rockstuhl

2011

Laser & Photonics Reviews

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“…This unusual enhancement is attributed to the excitation of SPs on the metal surface which dramatically enhances the optical throughput via the sub-wavelength aperture. This opens up a broad range of possibilities and applications from nanolithography [134][135][136][137] and imaging [138][139][140][141] to chemical sensing [142][143][144] and biophysics [145,146]. For instance, the use of SPs assisted mask could overcome the low throughput issue of photolithography through subwavelength aperture [134].…”

Section: Optics and Photonicsmentioning

confidence: 99%

“…For instance, the use of SPs assisted mask could overcome the low throughput issue of photolithography through subwavelength aperture [134]. Superlens, an ultrahigh-resolution lens that goes beyond the diffraction limit, is also attributed to the enhanced electric field through surface plasmon resonance while the resolution of the image is preserved resulting in a high-resolution imaging [138,139]. For the fabrication of nanostructures, most of the time, electron beam lithography or focused ion beam lithography are used to fabricate high-resolution patterns such as nanoscale hole arrays [127,134], bull's eye structures [132] and plasmonic lens [137].…”

Section: Optics and Photonicsmentioning

confidence: 99%

Review on Micro- and Nanolithography Techniques and their Applications

Pimpin

Srituravanich

2012

Self Cite

277

192

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Abstract. This article reviews major micro-and nanolithography techniques and their applications from commercial micro devices to emerging applications in nanoscale science and engineering. Micro-and nanolithography has been the key technology in manufacturing of integrated circuits and microchips in the semiconductor industry. Such a technology is also sparking revolutionizing advancements in nanotechnology. The lithography techniques including photolithography, electron beam lithography, focused ion beam lithography, soft lithography, nanoimprint lithography and scanning probe lithography are discussed. Furthermore, their applications are summarized into four major areas: electronics and microsystems, medical and biotech, optics and photonics, and environment and energy harvesting.

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“…Many SPP-based superlenses were presented recently [7][8][9] as well as resonance immunosensors [10], nanobiosensors [11] and nanoprobes [12]. One of the superlenses consists of a silver film coating on glass with some corrugations [13].…”

Section: Introductionmentioning

confidence: 99%

Near-field visualization of plasmonic lenses: an overall analysis of characterization errors

Wang¹,

Fu²,

Fang³

2016

Nano Online

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Many factors influence the near-field visualization of plasmonic structures that are based on perforated elliptical slits. Here, characterization errors are experimentally analyzed in detail from both fabrication and measurement points of view. Some issues such as geometrical parameter, probe-sample surface interaction, misalignment, stigmation, and internal stress, have influence on the final near-field probing results. In comparison to the theoretical ideal case of near-field probing of the structures, numerical calculation is carried out on the basis of a finite-difference and time-domain (FDTD) algorithm so as to support the error analyses. The analyses performed on the basis of both theoretical calculation and experimental probing can provide a helpful reference for the researchers probing their plasmonic structures and nanophotonic devices. 2069

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Realization of optical superlens imaging below the diffraction limit

Cited by 116 publications

References 29 publications

3D THz metamaterials from micro/nanomanufacturing

3D THz metamaterials from micro/nanomanufacturing

Review on Micro- and Nanolithography Techniques and their Applications

Near-field visualization of plasmonic lenses: an overall analysis of characterization errors

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