Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Matthias Plock,
Sven Burger,
Philipp-Immanuel Schneider
Abstract:Parameter reconstruction is a common problem in optical nano metrology. It generally involves a set of measurements, to which one attempts to fit a numerical model of the measurement process. The model evaluation typically involves to solve Maxwell's equations and is thus time consuming. This makes the reconstruction computationally demanding. Several methods exist for fitting the model to the measurements. On the one hand, Bayesian optimization methods for expensive black-box optimization enable an efficient … Show more
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