2022
DOI: 10.3390/bios12090762
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Recent Advances in Nanomechanical Membrane-Type Surface Stress Sensors towards Artificial Olfaction

Abstract: Nanomechanical sensors have gained significant attention as powerful tools for detecting, distinguishing, and identifying target analytes, especially odors that are composed of a complex mixture of gaseous molecules. Nanomechanical sensors and their arrays are a promising platform for artificial olfaction in combination with data processing technologies, including machine learning techniques. This paper reviews the background of nanomechanical sensors, especially conventional cantilever-type sensors. Then, we … Show more

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Cited by 22 publications
(24 citation statements)
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“…Since nanomechanical sensors including the MSS can obtain efficient signal responses to sorption-induced mechanical deformation of a bulk receptor material [ 26 , 39 ], we coated DNA on the membrane of an MSS by an inkjet spotter. The coating thickness was varied by changing the number of droplets of inkjet spotting ( N ) in the range from 100 to 1000.…”
Section: Resultsmentioning
confidence: 99%
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“…Since nanomechanical sensors including the MSS can obtain efficient signal responses to sorption-induced mechanical deformation of a bulk receptor material [ 26 , 39 ], we coated DNA on the membrane of an MSS by an inkjet spotter. The coating thickness was varied by changing the number of droplets of inkjet spotting ( N ) in the range from 100 to 1000.…”
Section: Resultsmentioning
confidence: 99%
“…The membrane is coated with a receptor material (in the present study, DNA). When the receptor layer deforms upon the sorption of the target analytes, the receptor layer generates surface stress on the membrane [ 26 ]. The surface stress is transduced to the four sensing beams as amplified uniaxial stress, resulting in changes in the electrical resistance of the piezoresistors embedded in the beams.…”
Section: Methodsmentioning
confidence: 99%
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