1996
DOI: 10.1115/1.2803644
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Recent Advances in the Study of Electrochemical Micromachining

Abstract: The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented.

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Cited by 36 publications
(39 citation statements)
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“…UR is defined as a unit of workpiece removed during one cycle/pulse of machining. The UR basically depends on the following factors [4,14,20].…”
Section: Materials Removal In Emmmentioning
confidence: 99%
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“…UR is defined as a unit of workpiece removed during one cycle/pulse of machining. The UR basically depends on the following factors [4,14,20].…”
Section: Materials Removal In Emmmentioning
confidence: 99%
“…The prediction of shape evolution during high rate anodic dissolution requires solving the current distribution at the anode along with a moving boundary algorithm. The current distribution at the anode depends on geometry, anode reaction kinetics, electrolyte conductivity and hydrodynamic conditions [4]. Current distribution is calculated for a given time using appropriate finite difference, finite and boundary element codes.…”
Section: Current Distribution and Shape Evolutionmentioning
confidence: 99%
See 1 more Smart Citation
“…However, except for electrochemical jet machining, electrochemical etching and wire electrochemical grinding, ECM still lags far behind other processes such as electric discharge machining (EDM) in the precision and micro-machining fields [7][8][9][10]. For the purpose of precise micro-machining, it is necessary to predict the final shape formed by the process when the machining parameters are given.…”
Section: Introductionmentioning
confidence: 99%
“…11 The electrolyte temperature, pressure variations in the inter electrode gap and the choice of an optimum gap voltage also avoid the occurrence of sparking and the consequent loss of the tool and workpiece. 12 A metal-matrix composite (MMC) contains matrix materials where reinforcements can be made from polymers, ceramics or metals. MMCs are divided into composites reinforced by fibres (fibrous composites) and composites filled with fine particles that are insoluble in the base-metal-strengthened composites.…”
Section: Introductionmentioning
confidence: 99%