2009
DOI: 10.1109/mei.2009.4976898
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Recent developments in the pressure wave propagation method

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Cited by 25 publications
(12 citation statements)
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“…Research on space charge behavior using nondestructive methods was first proposed by Collins, [ 44 ] and a number of measurement methods were developed afterward, [ 45–49 ] among which the pulsed electroacoustic (PEA) method [ 50 ] became one of the most commonly used space charge measuring methods till now. Thanks to these methods, encouraging progress has been made in understanding the space charge behavior in the past decades.…”
Section: Introductionmentioning
confidence: 99%
“…Research on space charge behavior using nondestructive methods was first proposed by Collins, [ 44 ] and a number of measurement methods were developed afterward, [ 45–49 ] among which the pulsed electroacoustic (PEA) method [ 50 ] became one of the most commonly used space charge measuring methods till now. Thanks to these methods, encouraging progress has been made in understanding the space charge behavior in the past decades.…”
Section: Introductionmentioning
confidence: 99%
“…Its resolution can reach 100 nm when using the femtosecond laser. However, due to the limitation of the target electrode generating pressure wave excitations, the resolution is difficult to further improve [18]. The resolutions of thermal methods are not illustrated here due to its slow measurement process and thermal excitation attenuation.…”
Section: Key Evaluation Indicators Of Space Chargementioning
confidence: 99%
“…When a force is applied to the sensor, the phase difference ϕ of the two components can be approximately characterized by (11). The light intensities of the two emitted lights from the Wollaston prism can then be expressed by (18).…”
Section: B Transformation and Detection Of Polarized Light In Ellipsometry Detection Systemmentioning
confidence: 99%
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“…However, an overarching interpretation of these physical phenomenon calls for the use of an additional characterization method for calculating the material charge profile. Various apparatus such as thermal [9], pressure wave [10] and pulsed electro-acoustic (PEA) system [11] have been developed for these purposes over the past 15 years. Some of the above methods were used to estimate in open air the electric charge inside insulators after irradiation, which means that the specimen should be detached from the irradiation facility [12].…”
Section: Introductionmentioning
confidence: 99%