Recent Frontiers in Anisotropic Wet Chemical Etching Techniques for Precision Surface Modification of Industrial-Grade Bulk Crystalline Silicon Wafers: Enhancing Performance in Photovoltaics and MEMS Devices

Iqbal, Sami; Guo, Xinli; Yi, Yang; Zhang, Xiao Yang; Zhang, Tong

doi:10.1007/s12633-024-02963-4

Silicon

2024

DOI: 10.1007/s12633-024-02963-4

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Recent Frontiers in Anisotropic Wet Chemical Etching Techniques for Precision Surface Modification of Industrial-Grade Bulk Crystalline Silicon Wafers: Enhancing Performance in Photovoltaics and MEMS Devices

Sami Iqbal,

Xinli Guo,

Yang Yi

et al.

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2024

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Cited by 1 publication

References 141 publications

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A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison

Karimi,

Fardoost,

Mhatre

et al. 2024

Micromachines

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In recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications. This review provides a comprehensive analysis of emerging fabrication technologies, including photolithography, soft lithography, 3D printing, electron-beam lithography (EBL), wet/dry etching, injection molding, focused ion beam (FIB) milling, laser micromachining, and micro-milling. Each of these methods offers unique advantages in terms of scalability, precision, and cost-effectiveness, enabling the creation of highly customized micro- and nanochannel structures. Challenges related to scalability, resolution, and the high cost of traditional techniques are addressed through innovations such as deep reactive ion etching (DRIE) and multipass micro-milling. This paper also explores the application potential of these technologies in areas such as lab-on-a-chip devices, biomedical diagnostics, and energy-efficient cooling systems. With continued research and technological refinement, these methods are poised to significantly impact the future of microfluidic and nanofluidic systems.

show abstract

A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison

Karimi,

Fardoost,

Mhatre

et al. 2024

Micromachines

View full text Add to dashboard Cite

show abstract

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Recent Frontiers in Anisotropic Wet Chemical Etching Techniques for Precision Surface Modification of Industrial-Grade Bulk Crystalline Silicon Wafers: Enhancing Performance in Photovoltaics and MEMS Devices

Cited by 1 publication

References 141 publications

A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison

A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison

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