2024
DOI: 10.1016/j.jmrt.2024.01.246
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Recent progress in high-entropy alloys: A focused review of preparation processes and properties

Bingxi Yu,
Yongsheng Ren,
Yi Zeng
et al.
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Cited by 25 publications
(2 citation statements)
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“…Overall, E-TOFMS is a versatile tool for the analysis of complex plasma processes involving multiple energetic and chemical species, therefore in particular suitable for supporting development in thin film technology, where the IEDF for multiple ions is of interest. Examples of such areas include the development of high entropy alloy or compound films, where the energy of the impinging species influences the structure and microstructure of the grown film, ,,, or optimisation of thin film systems and interfaces in electronics, photovoltaics, and energy storage. The presented applications focus on PVD, specifically magnetron sputtering, however, it is likely that it will prove to be useful in the context of plasma enhanced chemical vapor deposition and atomic layer deposition (PE-CVD, PE-ALD) in general, where information on the IEDF and the nature of the ionic species involved in film growth are important for understanding the growth mechanism.…”
Section: Discussionmentioning
confidence: 99%
“…Overall, E-TOFMS is a versatile tool for the analysis of complex plasma processes involving multiple energetic and chemical species, therefore in particular suitable for supporting development in thin film technology, where the IEDF for multiple ions is of interest. Examples of such areas include the development of high entropy alloy or compound films, where the energy of the impinging species influences the structure and microstructure of the grown film, ,,, or optimisation of thin film systems and interfaces in electronics, photovoltaics, and energy storage. The presented applications focus on PVD, specifically magnetron sputtering, however, it is likely that it will prove to be useful in the context of plasma enhanced chemical vapor deposition and atomic layer deposition (PE-CVD, PE-ALD) in general, where information on the IEDF and the nature of the ionic species involved in film growth are important for understanding the growth mechanism.…”
Section: Discussionmentioning
confidence: 99%
“…The disordered crystal structure of MPEAs can result in an enhanced strength, making these materials interesting from the point of view of structural applications [4,5]. In addition, MPEAs correspond to the unexplored middle parts of phase diagrams, motivating the extensive investigation into these materials in the recent decade [6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%