Recent progress in plasma modification of 2D metal chalcogenides for electronic devices and optoelectronic devices
Siying Tian,
Dapeng Sun,
Fengling Chen
et al.
Abstract:Two-dimensional metal chalcogenides (2D MCs) present a great opportunity for overcoming the size limitation of traditional silicon-based complementary metal-oxide-semiconductor (CMOS) devices. The controllable modulation compatible with CMOS processes is essential...
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