Recent progress in the functionalization of atomic force microscope probes using electron-beam nanolithography

Zhou, Haiping; Mills, Gordon B.; Chong, Bo; Midha, A.; Donaldson, L.; Weaver, John

doi:10.1116/1.581753

Cited by 27 publications

(14 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In order to demonstrate the temperature dependence, we have resistively heated the tip by passing a DC current I 1-3 through one pair of nanowires. The change in electrical conductance through another nanowire pair (2)(3)(4) induced by the heating of the tip was measured using lock-in techniques. The relative change in resistance, which is the ratio between the resistance at a certain level of the heating current and the resistance at room temperature, is shown in Figure 6.…”

Section: Electrical Characterizationmentioning

confidence: 99%

“…The cross junction serves as a cross Hall element, in which charge carriers are deflected by the Lorenz force induced by the applied magnetic field. Therefore, a Hall voltage can be detected between another electrode pair (2)(3)(4). The voltage U 2-4 of a cross Hall sensor placed in a static magnetic field B is given by [7,8]:…”

Section: Magnetic Characterizationmentioning

confidence: 99%

“…Scanning thermal microscopy (SThM) [1][2][3][4][5] and scanning Hall probe microscopy (SHPM) [6][7][8][9] are widely applied techniques for the study of micro-and nanoscale thermal and magnetic phenomena. At the heart of these techniques is a modified scanning probe, which consists of an cantilever having a sharp tip with a nanometer-scale electrical junction integrated at its apex.…”

Section: Introductionmentioning

confidence: 99%

“…On the other hand, an electrical junction in the form of a cross functions as a miniaturized Hall magnetometer enabling quantitative measurements of the surface magnetic field. Both thermal and Hall scanning probes can be realized by combining conventional micromachining with multiple level direct-write electron beam nanolithography [3,4,9]. Although this method allows batch fabrication of the probes, high cost of an E-beam system and the serial nature of its writing process make this method both expensive and unsuitable for high-volume manufacturing.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

Sarajlic¹,

Vermeer

Delalande

et al. 2010

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

View full text Add to dashboard Cite

We present a process for batch fabrication of a novel scanning microscopy probe for thermal and magnetic imaging using standard micromachining and conventional optical contact lithography. The probe features an AFMtype cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires coated by conductive material. The nanowires form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes or to serve as a miniaturized Hall magnetometer enabling, in principle, thermal and magnetic imaging by scanning the probe tip over a surface. We have successfully fabricated a first probe prototype with a nanowire tip composed of 140 nm thick and 11 µm long silicon nitride wires metallized by 6 nm titan and 30 nm gold layers. We have experimentally characterized electrical and thermal properties of the probe demonstrating its proper functioning.978-1-4244-5764-9/10/$26.00 ©2010 IEEE

show abstract

Section: Electrical Characterizationmentioning

confidence: 99%

Section: Magnetic Characterizationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

Sarajlic¹,

Vermeer

Delalande

et al. 2010

2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

View full text Add to dashboard Cite

show abstract

“…a) b) FIGURE 1.5 -Bi Hall cross with 50 nm width defined by focuced ion beam a) (Sandhu et al, 2004a), b) (Petit et al, 2004). FIGURE 1.6 -Bi Hall cross with 100 nm width defined on AFM tip by electron beam (Zhou et al, 1999).…”

Section: Introductionmentioning

confidence: 99%

Batch fabricated scanning Hall probes by corner lithography

Hatakeyama¹

View full text Add to dashboard Cite

In this chapter, I discuss nanometer sized Hall crosses on cantilever probes, fabricated by means of corner lithography. Scanning attempts on a permanent magnet show a strong topographic cross-talk. As this cross-talk was three orders of magnitude larger than the expected Hall signal, magnetic imaging over such a rough surface was impossible. We investigated the origin of the cross-talk by four different methods. These measurements clearly show that the asymmetry in the Hall cross, caused by fabrication imperfections, leads to an extra series resistance between the voltage sensing leads, resulting in an offset voltage on top of the output signal. Since this additional resistance is temperature dependent, the offset voltage varies with probe temperature. As the probe is heated by Joule heating, its temperature varies with probe-sample distance. This distance is slightly modulated due to topography of the sample while scanning, resulting in the observed strong topographic cross-talk. This work is a team effort by Edin Saraijlic, Martin Siekman and myself. My contribution is the theoretical model, the experiments and their analysis. The scanning Hall probes were fabricated by Edin Sarajlic. Martin Siekman assisted in construction of the measurement setup.

show abstract

Scanning Thermal Microscopy

Ocola

2012

Characterization of Materials

View full text Add to dashboard Cite

Scanning thermal microscopy (SThM) is a powerful characterization technique that has been steadily gaining recognition in the scientific community. It can be used on any solid material, and even in a liquid environment. This article covers a brief review of scanning probe history, SThM probes and an practical example on SThM microscopy. Care must be taken to interpret correctly any data acquired. This means to use alternate techniques to form a “big picture” of the tip – sample interaction. Simultaneous acquisition of topography and thermal data is not enough. Some key hurdles to overcome to make this characterization technique more accessible are the commercial availability of low‐loss probes and scanning thermal microscopes, and newer thermal probing techniques.

show abstract

Recent progress in the functionalization of atomic force microscope probes using electron-beam nanolithography

Abstract: Articles you may be interested inCombined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots

Cited by 27 publications

References 20 publications

Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining

Batch fabricated scanning Hall probes by corner lithography

Scanning Thermal Microscopy

Contact Info

Product

Resources

About