Recent Progress on High-Entropy Films Deposited by Magnetron Sputtering

Garah, Mohamed El; Briois, Pascal; Sanchette, Frédéric

doi:10.3390/cryst12030335

Cited by 19 publications

(4 citation statements)

References 103 publications

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“…Finally, possibly the most important output of the current work for industrial applications is the demonstration of the ability of reactive HiTUS to produce multicomponent coatings with mechanical properties equal to those in a similar arc and DCMS metallic and nitride coating systems [ 9 , 10 , 12 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 47 , 48 , 49 , 50 , 51 ] without a feedback control of target poisoning. The structures of the studied coatings, despite variations and deviations from equiatomic concentrations of TM elements at different scales, corresponded to homogeneous solid solutions regardless of the amount of nitrogen.…”

Section: Discussionmentioning

confidence: 99%

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Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

et al. 2023

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High entropy metal sub-lattice stabilized nitride coatings based on multicomponent refractory transition metals (TM = Ti, Nb, V, Ta, Zr, Hf) are promising candidates for extreme conditions due to their high thermal, mechanical, and corrosion properties. The aims of the current work included the investigations of the possibilities of the novel High Target Utilization Sputtering (HiTUS) technique applied to reactive sputtering of TiNbVTaZrHf–xN coatings from the viewpoints of hysteresis behavior during reactive sputtering as well as the structure, composition, stoichiometry, and mechanical properties of the resulting coatings. With increasing nitrogen content, coating structures varied from amorphous in metallic alloy coatings to textured nano-columnar fcc structures. Despite certain deviations of TM from equiatomic concentrations, homogeneous solid solutions corresponding to single-phase multicomponent nitride analogous to high entropy stabilized compounds were obtained. Mechanical properties were found to be proportional to nitrogen content. The highest hardness HIT ~ 33 GPa and indentation modulus EIT ~ 400 GPa were found in a slightly sub-stoichiometric (~42 at% nitrogen) composition. HIT/EIT and limited pillar split measurements suggested that these coatings exhibit low fracture toughness (around 1 MPa.m1/2). The work confirmed that reactive HiTUS is suitable for the preparation of multicomponent nitrides with the control of their stoichiometry and mechanical properties only via nitrogen additions.

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Section: Discussionmentioning

confidence: 99%

“…The recent reviews on high entropy ceramic coatings can be found in [ 12 , 16 , 17 ]. Probably the first multicomponent high entropy-like nitride coatings were deposited in 2004 from FeCoNiCrCuAl (Mn) targets by reactive DC magnetron sputtering (DCMS) [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

et al. 2023

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“…TiN belongs to the category of transition metal nitrides and possesses outstanding physical and mechanical properties, along with considerably high resistance to oxidation and corrosion. Due to these exceptional characteristics, TiN-based thin films are utilized in various applications such as wear-resistant coatings on cutting tools [1], microelectronics applications on semiconductors and interconnectors [2], corrosionresistant coating at acidic ambient [3], oxidationresistant coating for high-temperature applications [4]. TiN thin film can be synthesized through various techniques such as laser ablation [5], thermal evaporation, Chemical Vapor Deposition (CVD) [6], Cathodic Arc Evaporation (CAE) [7], ion beam-assisted Physical Vapor Deposition (IBPVD) [8] and sputtering.…”

Section: Introductionmentioning

confidence: 99%

Influence of topography on nano-mechanical properties of cylindrical magnetron sputtered TiN films

Atta,

Mathew,

Dash

et al. 2024

Surf. Topogr.: Metrol. Prop.

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Numerous studies on Nano-mechanical behavior of the thin films explained primarily in terms of their film morphology and particle size rather than film topography. Therefore, the current study investigates the effect of film topography on the nano-mechanical characteristics of the film. Ti/TiN multilayer thin films were deposited at varying deposition pressures by using an indigenously developed Cylindrical Magnetron Sputtering (CMS) unit. Surface crystallographic information is characterized by synchrotron-based Grazing Incidence XRD analysis. Film growth follows self-assembled nano hill architecture as revealed by AFM and in-situ Scanning Probe Microscopy images. The tribo-mechanical properties of the film is dependent on the height and spacing of its self-assembled structure, which experiences either crushing or buckling under the indenter load, thereby affecting film characteristics. Film deposited at moderate pressure exhibits superior wear behavior, attributed to the interplay between Plasticity Index (PI) and Depth Recovery Ratio (DRR). The study primarily focused on film growth phenomena by using cylindrical targets and their influence on nanomechanical properties of the film.

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“…High-entropy films (HEFs), which are cost-effective, have also been investigated [6][7][8][9][10][11][12][13] and have revealed interesting Mohamed El Garah and Driss Soubane have equal contribution.…”

Section: Introductionmentioning

confidence: 99%

Review on mechanical and functional properties of refractory high-entropy alloy films by magnetron sputtering

El Garah,

Soubane,

Sanchette

2023

emergent mater.

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Refractory high-entropy films (RHEFs), as multi-component materials, have garnered significant attention due to their potential use in high-temperature applications. RHEFs are endowed with unique microstructural and functional properties due to the use of refractory elements. In this review, we examine the recent state of research on RHEFs deposited by the magnetron sputtering technique. The microstructure of RHEFs has been analyzed/explored and the mechanical properties as well as the main hardening mechanisms of these films are discussed. Furthermore, functional properties such as resistance to corrosion and wear, electrical and irradiation performances, and high-temperature oxidation were evaluated. RHEFs can meet market demand in the field of engineering materials. However, many challenges, such as low ductility at room temperature, remain to be overcome. This review provides an overview of the strengths and weaknesses of RHEFs produced using magnetron sputtering.

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Recent Progress on High-Entropy Films Deposited by Magnetron Sputtering

Cited by 19 publications

References 103 publications

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties

Influence of topography on nano-mechanical properties of cylindrical magnetron sputtered TiN films

Review on mechanical and functional properties of refractory high-entropy alloy films by magnetron sputtering

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