Recent research progress of master mold manufacturing by nanoimprint technique for the novel microoptics devices

Liu, Yuhang; Lin, Jianjun; Hu, Zuohuan; Gao, Guangzhen; Wang, Bingyang; Wang, Liuyi; Pan, Zhiyuan; Jia, Jianfei; Yin, Qudong; Guo, Dengji; Wang, Xujin

doi:10.1007/s11706-022-0596-6

Cited by 1 publication

(1 citation statement)

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“…NIL stamps thus, provide rapid, high-resolution nanopatterning with high-throughput and low cost, tackling industrial needs [ 241 ]. Recently, Liu et al [ 242 ] highlighted the ease of production of structures via NIL as useful in augmented reality glasses, vehicle lighting and 3D displays. Whilst the NIL stamp can be hard or soft, for harder silicon-based templates, there are difficulties which occur when eliminating defects and removing the stamp from the substrate due to deposition at its edges, both of which can cause damage to the stamp.…”

Section: Emerging Lithographic Techniquesmentioning

confidence: 99%

Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications

Stokes,

Clark,

Odetade

et al. 2023

Discover Nano

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Nano-fabrication techniques have demonstrated their vital importance in technological innovation. However, low-throughput, high-cost and intrinsic resolution limits pose significant restrictions, it is, therefore, paramount to continue improving existing methods as well as developing new techniques to overcome these challenges. This is particularly applicable within the area of biomedical research, which focuses on sensing, increasingly at the point-of-care, as a way to improve patient outcomes. Within this context, this review focuses on the latest advances in the main emerging patterning methods including the two-photon, stereo, electrohydrodynamic, near-field electrospinning-assisted, magneto, magnetorheological drawing, nanoimprint, capillary force, nanosphere, edge, nano transfer printing and block copolymer lithographic technologies for micro- and nanofabrication. Emerging methods enabling structural and chemical nano fabrication are categorised along with prospective chemical and physical patterning techniques. Established lithographic techniques are briefly outlined and the novel lithographic technologies are compared to these, summarising the specific advantages and shortfalls alongside the current lateral resolution limits and the amenability to mass production, evaluated in terms of process scalability and cost. Particular attention is drawn to the potential breakthrough application areas, predominantly within biomedical studies, laying the platform for the tangible paths towards the adoption of alternative developing lithographic technologies or their combination with the established patterning techniques, which depends on the needs of the end-user including, for instance, tolerance of inherent limits, fidelity and reproducibility.

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Section: Emerging Lithographic Techniquesmentioning

confidence: 99%