The electronic properties of hydrogenated amorphous silicon ͑a-Si: H͒ relax following stretched exponentials. This phenomenon was explained in the past by dispersive hydrogen diffusion, or by retrapping included hydrogen motion. In this letter, the authors report that the electronic passivation properties of intrinsic a-Si: H/crystalline silicon ͑c-Si͒ interfaces relax following a similar law. Carrier injection dependent a-Si: H / c-Si interface recombination calculations suggest this originates from amphoteric interface state ͑or Si dangling bond͒ reduction, rather than from a field effect. These findings underline the similarity between a-Si: 3 Alternatively, c-Si surface dangling bond passivation may also be obtained by deposition of intrinsic hydrogenated amorphous silicon ͑a-Si: H͒ films. 4 As such films can, in addition, be doped relatively easily, they allow for the fabrication of electronically abrupt a-Si: H / c-Si heterojunctions.5 Since direct deposition of such doped films on c-Si can result in poor interface properties, typically, a few nanometer thin intrinisic a-Si: H͑i͒ buffer layer is inserted in between for a-Si: H / c-Si heterostructure solar cell fabrication.6 Impressive large area ͑Ͼ100 cm 2 ͒ energy conversion efficiencies ͑Ͼ22% ͒ have been reported for such devices.7 For this, atomically sharp a-Si: H / c-Si interfaces, i.e., where no epitaxial Si ͑epi-Si͒ film was grown on the wafer during film deposition, are considered to be essential. 8 This can be monitored in real time by various optical probes.9,10 On a related note, the excellent a-Si: H / c-Si interface passivation properties may also offer an explanation why surrounding a-Si: H tissue is crucial for device-grade microcrystalline Si.11 Nevertheless, the relation between processing parameters and the physical mechanism underlying the a-Si: H / c-Si interface passivation is not yet fully understood.Previously it was suggested that low-temperature annealing is beneficial for the interface passivation quality, provided that neither epi-Si at the interface 12 nor boron-doped overlayer 13,14 is present. In this letter, we show that under these conditions electronic passivation relaxation can be accurately described by stretched exponentials. It is observed that even moderate temperature ͑ഛ 180°C͒ annealing can yield an extremely low interface recombination activity. Carrier injection dependent recombination calculations suggest that the origin of this phenomenon is related to dangling bond reduction at the interface, rather than to a field effect.Consequently, similar to the SiO 2 / c-Si interface, 15 also here, a strong analogy between the nature of the defects present at the a-Si: H͑i͒ / c-Si interface and those in the a-Si: H͑i͒ bulk may possibly exist.For the experiments, 300 m thick ϳ3.0 ⍀ cm phosphorus-doped high quality float zone ͑100͒ FZ-Si wafers were used. Both substrate surfaces were mirror polished to eliminate the influence of substrate surface roughness on the passivation properties. 16 Surface cleaning simply consisted o...