Reconfigurable multiband SAW filters for LTE applications

Galipeau, J.; Mouthaan, Koen; Briot, E.; Abbott, B. P.

doi:10.1109/rws.2013.6486705

Cited by 7 publications

(3 citation statements)

References 6 publications

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“…The field of RF micro-electromechanical systems is another important example where electroacoustic transduction of bulk and surface acoustic waves in acoustic resonators enables some devices which outperform conventional RF electronics. These include reconfigurable filters 22 , narrowband signal filtering 23 , and high quality factor (Q) resonators 24 . These devices are also being integrated into microelectronic systems for improved performance 25 .…”

Section: Introductionmentioning

confidence: 99%

Elastic Wave Eigenmode Solver for Acoustic Waveguides

Dostart,

Liu,

Popović

2017

Preprint

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A numerical solver for the elastic wave eigenmodes in acoustic waveguides of inhomogeneous cross-section is presented. Operating under the assumptions of linear, isotropic materials, it utilizes a finite-difference method on a staggered grid to solve for the acoustic eigenmodes of the vector-field elastic wave equation. Free, fixed, symmetry, and anti-symmetry boundary conditions are implemented, enabling efficient simulation of acoustic structures with geometrical symmetries and terminations. Perfectly matched layers are also implemented, allowing for the simulation of radiative (leaky) modes. The method is analogous to eigenmode solvers ubiquitously employed in electromagnetics to find waveguide modes, and enables design of acoustic waveguides as well as seamless integration with electromagnetic solvers for optomechanical device design. The accuracy of the solver is demonstrated by calculating eigenfrequencies and mode shapes for common acoustic modes in several simple geometries and comparing the results to analytical solutions where available or to numerical solvers based on more computationally expensive methods.

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Section: Introductionmentioning

confidence: 99%

Elastic Wave Eigenmode Solver for Acoustic Waveguides

Dostart,

Liu,

Popović

2017

Preprint

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“…A series of techniques and new materials have been developed to simplify the fabrication process, making such devices compact and with a low fabrication cost. Today, SAW devices represent a key technology in many fields, such as automotives, electronics, medical, aerospace, and defense [ 4 , 5 , 6 , 7 , 8 , 9 ]. Moreover, SAW resonators are widely used in sensing applications because of their unique features that enable them to be used as detectors in battery-less systems with remote wireless interrogation [ 10 , 11 , 12 , 13 , 14 , 15 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

Equivalent Circuit Model Extraction for a SAW Resonator: Below and above Room Temperature

Gugliandolo

Marinković

Crupi

et al. 2022

Sensors

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In this work, a SAW resonator is characterized in terms of admittance (Y-) parameters in the temperature range spanning from 0 °C to 100 °C, with the aim of highlighting how its physical properties are affected by the temperature change. A lumped-element equivalent-circuit model is used to represent the device under test at the considered temperature conditions and a parameters extraction process based on a Lorentzian fitting is developed for the determination of the equivalent-circuit elements in the investigated temperature range. A very good agreement is observed between the performed measurements and the model simulations. The characterization process and the subsequent equivalent-circuit parameters extraction at different temperature values are described and discussed.

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“…Acoustic filters are among the most compact devices that can be used for RF communication systems [1][2][3], and recent improvements of composite MEMS resonators enable to achieve very high quality factors Q, allowing for low-imprint devices and operating frequencies as high as 8 GHz [4] [5]. A lot of research efforts were focused on bulk acoustic wave (BAWs) [6][7][8] devices which offered many potentialities for smart RF components or systems, especially as an alternative to surface acoustic waves (SAWs) filters [9] [10].…”

Section: Introductionmentioning

confidence: 99%

Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers

Mortada

Zahr

Orlianges

et al. 2017

Journal of Applied Physics

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International audienceThis paper reports on the design, simulation, fabrication and test results of ZnO-based contour-mode micro-resonators integrating piezoelectric zinc oxide (ZnO) layers. The inter-digitated (IDTs) type micro-resonators are fabricated on ZnO films and suspended top of 2µm thick silicon membranes using silicon-on insulator (SOI) technology. We analyze several possibilities of increasing the quality factor (Q) and the electromechanical coupling coefficient (k t 2) of the devices by varying the numbers and lengths of the IDTs electrodes and using different thicknesses of the ZnO layer. We designed and fabricated IDTs of different finger numbers (n=25, 40, 50 and 80) and lengths (L=100/ 130/ 170/ 200 µm) for three different thicknesses of ZnO films (200, 600 and 800 nm). The measured Q factor confirms that reducing the length and the number of IDTs fingers enables to reach better electrical performances at resonant frequencies around 700 MHz. The extracted results for an optimized micro-resonator device having a IDTs length of 100 μm and 40 finger electrodes, show a Q of 1180 and a k t 2 of 7.4%. We demonstrate also that the reduction of the ZnO thickness from 800 nm to 200 nm increases the quality factor from 430 to 1600 respectively, around 700 MHz. Experimental data are in very good agreement with theoretical simulations of the fabricated device

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Reconfigurable multiband SAW filters for LTE applications

Cited by 7 publications

References 6 publications

Elastic Wave Eigenmode Solver for Acoustic Waveguides

Elastic Wave Eigenmode Solver for Acoustic Waveguides

Equivalent Circuit Model Extraction for a SAW Resonator: Below and above Room Temperature

Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers

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