Reconstruction of a scanned topographic image distorted by the creep effect of a <i>Z</i> scanner in atomic force microscopy

Han, Cheolsu; Chung, Chung Choo

doi:10.1063/1.3590778

Cited by 13 publications

(5 citation statements)

References 24 publications

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“…Another source of distortion are scanning system imperfections. In open loop systems SPM scanners are subject to systematic errors related to the piezoelectric actuators hysteresis, non-linearity, and creep [ 117 ]. In closed loop systems errors arise from non-linearity of sensors and inaccuracy and linear guidance system imperfections [ 118 ].…”

Section: Artificial Spm Datamentioning

confidence: 99%

Synthetic Data in Quantitative Scanning Probe Microscopy

Nečas

Klapetek

2021

Nanomaterials

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Synthetic data are of increasing importance in nanometrology. They can be used for development of data processing methods, analysis of uncertainties and estimation of various measurement artefacts. In this paper we review methods used for their generation and the applications of synthetic data in scanning probe microscopy, focusing on their principles, performance, and applicability. We illustrate the benefits of using synthetic data on different tasks related to development of better scanning approaches and related to estimation of reliability of data processing methods. We demonstrate how the synthetic data can be used to analyse systematic errors that are common to scanning probe microscopy methods, either related to the measurement principle or to the typical data processing paths.

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Section: Artificial Spm Datamentioning

confidence: 99%

Synthetic Data in Quantitative Scanning Probe Microscopy

Nečas

Klapetek

2021

Nanomaterials

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“…Creep, hysteresis, and vibration effects are minimized by implementing a proportional plus derivative high‐gain feedback controller and feedforward controller in . An image reconstruction method for eliminating the creep effect in a Z –scanner in an AFM is proposed in . In , a cascade model for the creep, hysteresis, and vibrational dynamics of piezo scanners is introduced, and the inverse dynamics are utilized to compensate for these effects in an open‐loop fashion.…”

Section: Innovative Solutions Of the Ptsmentioning

confidence: 99%

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Rana

Pota

Petersen

2018

Asian Journal of Control

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In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs); and (iv) effect of thermal drift. This article presents a survey of the literature on the PTS, an overview of a few existing innovative solutions for its nanopositioning and future research directions. This article will help the reader to walk around the present development of the PTS aimed at meeting the requirements for high-speed AFM imaging.

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“…18. An image reconstruction method for eliminating the creep effect in a Z-scanner in an AFM is proposed in [121]. In [118], a cascade model for the creep, hysteresis, and vibrational dynamics of piezo scanners is introduced, and the inverse dynamics are utilized to compensate for these effects in an open-loop fashion.…”

Section: ) Compensation Of Creep Effectmentioning

confidence: 99%

Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey

Rana

Pota

Petersen

2017

IEEE Trans. Automat. Sci. Eng.

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Nanotechnology is the branch of science which deals with the manipulation of matters at an extremely high resolution down to the atomic level. In recent years atomic force microscopy (AFM) has proven to be extremely versatile as an investigative tool in this field. The imaging performance of AFMs is hindered by: (i) the complex behavior of piezo materials, such as vibrations due to the lightly damped low-frequency resonant modes, inherent hysteresis and creep nonlinearities; (ii) the crosscoupling effect caused by the piezoelectric tube scanner (PTS); (iii) the limited bandwidth of the probe; (iv) the limitations of the conventional raster scanning method using a triangular reference signal; (v) the limited bandwidth of the proportionalintegral (PI) controllers used in AFMs; (vi) the offset, noise, and limited sensitivity of position sensors and photodetector; and(vii) limited sampling rate of AFM's measurement unit. Due to these limitations, an AFM has a high spatial but low temporal resolution, i.e., its imaging is slow, e.g., an image frame of a living cell takes up to 120 s, which means that rapid biological processes that occur in seconds cannot be studied using commercially available AFMs. There is a need, to perform fast scans using an AFM with nanoscale accuracy. This paper presents a survey of the literature, presents an overview of a few emerging innovative solutions in AFM imaging, and finally proposes future research directions. Note to Practitioners→ An atomic force microscope (AFM)is a scientific instrument capable of investigating, controlling, and manipulating matter on a nanoscale. It is a fundamental part of research in the field of nanotechnology because of its capability to obtain 3D images of specimens in the areas of life sciences and materials science. However, the imaging performances of currently available AFMs are restricted by some limitations which, during the last two decades, several works have attempted to overcome in order to meet present demands. This article presents an overview of developments in AFM imaging, emphasizing the key roles of: the modeling, control techniques, and mechanical structural designs of an AFM's piezoelectric tube scanner (PTS) and probe; different scanning methods; and sensor noise compensation techniques.

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Reconstruction of a scanned topographic image distorted by the creep effect of a Z scanner in atomic force microscopy

Cited by 13 publications

References 24 publications

Synthetic Data in Quantitative Scanning Probe Microscopy

Synthetic Data in Quantitative Scanning Probe Microscopy

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey

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