1997
DOI: 10.1103/physrevb.55.13193
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Reconstruction of surface morphology from coherent x-ray reflectivity

Abstract: The observation of coherent diffraction effects in recent measurements of x-ray reflectivity from Si surfaces is explained with the development of a simple kinematical theory. Some properties of the derived formalism are explored. We apply an algorithm developed by Gerchberg and Saxton and demonstrate its application to the reconstruction of the surface morphology from its coherent diffraction pattern. Initial testing with experimental data shows the method to be effective.

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Cited by 55 publications
(27 citation statements)
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“…3. The time resolution achieved by this approach extends previous coherent X-ray diffraction experiments, as pioneered by, for example, Vartanyants et al (1997) and Robinson et al (1999), which Reconstructed relative phase and beam profile (normalized amplitude) along the sample from simulated data. The starting guess (blue, dotted) was taken to be constant but can also be a random guess.…”
Section: Introductionsupporting
confidence: 50%
“…3. The time resolution achieved by this approach extends previous coherent X-ray diffraction experiments, as pioneered by, for example, Vartanyants et al (1997) and Robinson et al (1999), which Reconstructed relative phase and beam profile (normalized amplitude) along the sample from simulated data. The starting guess (blue, dotted) was taken to be constant but can also be a random guess.…”
Section: Introductionsupporting
confidence: 50%
“…37 We used the surface-sensitive speckle patterns on a crystal truncation rod (CTR). 38,39,40 The CTR x-ray speckles arise from interferences between structure factors of up (+) and down (−) terminations. 41,42,43 A simple derivation 15 yields the CTR structure factor for a fixed l from a mix of + and − domains as, The temporal behavior of the domain boundary motions can be characterized by a single thermodynamic parameter τ, correlation time, using XPCS autocorrelation analysis.…”
Section: Resultsmentioning
confidence: 99%
“…Due to this arrangement, the footprint of the beam on the sample is highly elongated such that its speckle pattern becomes one dimensional. The reconstruction of the 1D profile of the topography was achieved successfully with the above described algorithm [228] and used to describe the kinetics of silicon oxidation [227]. In the GISAXS geometry, test samples made of arrays of SiGe quantum dots grown on a patterned surface [229] have been inverted successfully; the size of the particles were in the 100 nm range.…”
Section: Direct Data Inversion From Coherent Gisaxs?mentioning
confidence: 99%