“…In fact, in situ TEM techniques have now become the most widely used method for characterizing a range of NWs, such as Si,101, 102 GaAs103, 104, 105, 106 ZnO,107, 108 VO 2 109. GaN,99, 110, 111 ZnTe,112 Ag,113, 114, 115, 116, 117 Ni118, 119 Cu,120, 121, 122 and metallic glasses 123, 124
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shows an SEM image of the first MEMS device successfully integrated into a TEM for in situ nanoscale mechanical testing by Saif et al13 The freestanding specimen being tested was fabricated together with the MEMS structure, and is suspended at the center of the MEMS device.…”