“…[13][14][15] Transition metal oxides (TMOs) in ZnO are used not only for thin-film transistors 16) and solar cells 17) but also for obtaining superior properties of memory devices. [18][19][20][21] Other binary TMOs, such as ZrO 2 , [22][23][24][25] HfO 2 , 10) TiO 2 , 26,27) WO 3 , 28) Al 2 O 3 , 29) and SiO x , have also received considerable attention. 30) At present, the RS characteristics can be obtained using a variety of deposition techniques, such as radio-frequency (RF) magnetron sputtering, atomic layer deposition, and plasma-oxidized metal deposition.…”