2011
DOI: 10.1109/led.2011.2104936
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Redox Reaction Switching Mechanism in RRAM Device With $\hbox{Pt/CoSiO}_{X}\hbox{/}\hbox{TiN}$ Structure

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Cited by 124 publications
(48 citation statements)
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“…Recently, the Resistive Random Access Memory (RRAM) has become widely popular because of high density storage, high speed to read and write, low power consumption, simple MetalInsulator-Metal (MIM) sandwich, configuration compatibility with CMOS, [1][2][3][4][5] and relatively small size of device for the Resistance Switching (RS) phenomenon, which is embedded in the device by using one or a few conducting parts of channel. The atomic switch usually has an asymmetric structure where an insulator (HfO 2 , NiO, ZrO 2 , Ti 2 O 5 ,etc) [6][7][8][9][10][11] layer is sandwiched between an oxidiza-ble electrode (Ag or Cu) and an inert electrode (Pt or Au).…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the Resistive Random Access Memory (RRAM) has become widely popular because of high density storage, high speed to read and write, low power consumption, simple MetalInsulator-Metal (MIM) sandwich, configuration compatibility with CMOS, [1][2][3][4][5] and relatively small size of device for the Resistance Switching (RS) phenomenon, which is embedded in the device by using one or a few conducting parts of channel. The atomic switch usually has an asymmetric structure where an insulator (HfO 2 , NiO, ZrO 2 , Ti 2 O 5 ,etc) [6][7][8][9][10][11] layer is sandwiched between an oxidiza-ble electrode (Ag or Cu) and an inert electrode (Pt or Au).…”
Section: Introductionmentioning
confidence: 99%
“…[8][9][10][11][12][13] Among numerous resistive switching materials, the silicon-based oxide thin films were intensively investigated for the applications in RRAM for portable electrical devices owing to its compatibility in integrated circuit (IC) processes and relative stability compared with metal oxide materials. [14][15][16][17][18][19][20][21][22][23][24][25][26] Filament formation and rupture is considered to be the reason of resistive switching in RRAM devices.…”
Section: Introductionmentioning
confidence: 99%
“…Technological development of on-display devices, logic IC, batteries, and memory is crucial for advanced portable electronic product applications. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15] Among these devices, a reliable, fast-working, and energy-saving nonvolatile memory is extremely important, especially for portable applications. Resistance random access memory (RRAM) has great potential to serve as the next-generation nonvolatile memory device due to its simple structure, low power consumption, rapid operation, and high density integration capability.…”
mentioning
confidence: 99%