Superconducting nanowire single photon detectors (SNSPDs) are fabricated directly on diamond substrates and their optical and electrical properties are characterized. Dark count performance and photon count rates are measured at varying temperatures for 1310nm and 632nm photons. The procedure to prepare diamond substrate surfaces suitable for the deposition and patterning of thin film superconducting layers is reported. Using this approach, diamond substrates with less than 300pm RMS surface roughness are obtained.Diamond has recently gained significant interest as a promising platform for on-chip high-performance photonic devices [1][2][3]. Diamond exhibits many favorable material properties such as a high refractive index (n=2.4), wide bandgap (5.5eV), and a large optical transmission range from the UV to the mid infrared. Diamond is also host to numerous defect color centers such as the nitrogen-vancancy (NV) center, that can be utilized as an optically addressable spin based memory, particularly interesting in the field of quantum information processing [4,5]. In addition, diamond has a relatively large Kerr non-linearity [6] (n 2 = 1.3 · 10 −19 m 2 /W) making it an attractive platform for on-chip nonlinear optics in the visible and infrared wavelengths [7]. An exciting application for utilizing this diamond non-linearity could allow for frequency conversion of photons generated by color centers in diamond, which typically emit in the visible range, to the telecom wavelengths [8]. This could enable transmission of quantum information and distribution of quantum entanglement [9, 10] over long distances, for the realization of quantum repeaters. Such an integrated diamond quantum photonics platform would benefit from the realization of high performance single photon detectors, with broadband photon sensitivity, that are integrated directly on the same diamond chip.Superconducting nanowire single photon detectors (SNSPDs) outperform other single photon detector technologies on several merits such as quantum efficiency [11], timing jitter, dark count rates, and broad spectral sensitivity [12,13]. SNSPDs typically consist of narrow width nanowires patterned into an ultrathin (4nm to 8nm) superconducting film, commonly made from niobium nitride or some derivative of [14]. The nanowires are current biased close to the critical current of the superconductor. When an incident photon is absorbed by the wire, a small resistive hotspot is formed generating a voltage pulse that can be subsequently amplified and measured [15]. Since the performance of SNSPDs is critically * loncar@seas.harvard.edu dependent on nanowire structural uniformity, it is crucial to have them deposited on smooth substrate surfaces to avoid constrictions that can have detrimental effects on detection efficiency [16].In this letter, we report NbTiN superconducting nanowires deposited directly on diamond substrates that exhibit promising single photon sensitivity. Specifically, we provide details of the fabrication procedure developed, resulting in ...