Reducing anchor loss in micromechanical resonators using phononic crystal strips

Hsu, Jin‐Chen; Hsu, Feng-Chia; Huang, Tsun-Che; Wang, C.-H.; Chang, Po‐Cheng

doi:10.1109/ultsym.2011.0617

Cited by 6 publications

(3 citation statements)

References 11 publications

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“…2,[4][5][6][7][8][9][10] In addition to this, low compatibility with IC chips, high cost and large size of the quartz crystal technology create good opportunities for MEMS resonators-based technologies to take over the market. [11][12][13][14][15][16] But, the MEMS resonators still face outstanding challenges due to energy loss. This causes a significant decrease in the quality factor.…”

Section: Introductionmentioning

confidence: 99%

“…The anchor loss due to the acoustic wave leaky to the supporting structure is the main energy dissipation source in the MEMS resonator. 15,17,18) Some of the strategies used to minimize anchor loss in MEMS resonators are positioning the tether at nodal locations of the resonance mode, narrowing the width of supporting tether, using different materials for supporting and vibrating body to form an acoustic impedance mismatch and designing the tether with an odd multiple of a quarter wavelength l .…”

Section: Introductionmentioning

confidence: 99%

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Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Workie

Bao

et al. 2021

Jpn. J. Appl. Phys.

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Piezoelectric-on-silicon MEMS resonator is very well known for its compatibility with CMOS integrated circuit technology. However, its quality factor (Q) is highly affected by acoustic energy loss through the supporting structures. In this study, a resonator with butterfly-like round edge resonating plate structure and deploying properly designed PnC arrays on the tether and the anchoring boundaries are proposed to scale up the quality factor by effectively reducing the energy loss. The finite element analysis simulation results reveal that the proposed topologies can efficiently change the displacement field in the resonating plate and reduce the anchor loss. Consequently, an unloaded quality factor Q u of the conventional resonator is raised from 29 899 to 51 503 (butterfly-like round edge resonating structure), 83 349 (Phononic crystal on the tether) and 83 899 (Phononic crystal on the anchor), representing 1.7 folds, 2.78 folds and 2.8 folds improvement respectively.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Workie

Bao

et al. 2021

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…The PnC anchor is a promising approach to reduce anchor loss, since it is able to form complete bandgaps in which the propagations of the acoustic waves are prohibited. However, most current PnCs require the membrane thickness to be approximately the same size as the lattice constant to achieve sufficient bandwidth [ 16 , 17 , 18 ]. Studies of PnC-based anchors have rarely been conducted when the scale of the membrane is 1 μm or even less.…”

Section: Introductionmentioning

confidence: 99%

Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Tong

Han

2021

Micromachines

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Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (k2) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators.

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A wide band gap phononic crystal strip for quality factor improvement in a length extensional mode MEMS resonator

2022

Arch Appl Mech

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Reducing anchor loss in micromechanical resonators using phononic crystal strips

Cited by 6 publications

References 11 publications

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

A wide band gap phononic crystal strip for quality factor improvement in a length extensional mode MEMS resonator

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