Reducing gas-sensing performance of Ce-doped SnO₂ thin films through a cosputtering method

Abstract

SnO2 thin films doped with various concentrations of Ce were grown by cosputtering Sn and Ce metallic targets in an Ar/O2 mixed atmosphere.

Crystal phase content-dependent functionality of dual phase SnO2–WO3nanocomposite filmsviacosputtering crystal growth

“…The optimal operating temperature of the semiconductors is associated with a resultant equilibrium between surface reaction with ethanol vapor and the diffusion of ethanol vapor to the surface of the materials. 1 An optimal operating temperature of the SnO 2 thin lm was 325 C in this study. Furthermore, the highest ethanol gas-sensing response for the WO 3 thin lm was reached at the operating temperature of 350 C which is the maximum temperature of the measurement system.…”

“…SnO 2 thin lms have been prepared through various methods such as sputtering, chemical solution deposition, spray pyrolysis deposition, and the sol-gel process. 1,[4][5][6] Of these methods, sputtering has the potential to synthesize oxide thin lms with precise thickness control, tunable crystallinity, and large-area deposition. Sputtering SnO 2 thin lms is therefore of potential interest for gas sensor and photocatalyst applications.…”

“…For example, Ce-doped SnO 2 thin lms exhibit a superior ethanol gas-sensing response to that of pure SnO 2 thin lms. 1 Ag-doped SnO 2 thin lms have been synthesized through spray pyrolysis, demonstrating enhanced H 2 S gas detection ability compared with that of pure SnO 2 thin lms. 7 Doping impurity atoms into SnO 2 lattices affects the crystal defects and surface morphology of SnO 2 thin lms, thereby changing its gas-sensing ability.…”

Facile Synthesis of Ce–Doped SnO2 Nanoparticles: A Promising Photocatalyst for Hydrogen Evolution and Dyes Degradation

“…One Gaussian curve of the O 1 s spectra is associated with the oxygen ions in the Sn 4+ ‐O. The remaining peaks obtained at higher binding energies refer to non‐lattice oxygen that is substantial oxygen vacancies within the crystal lattice and surface defects on doping with Ce into SnO 2 ,,. On comparison, the core level XPS spectrum of pure SnO 2 was also studied and its deconvolution attributed to two peaks centered at 530.9 eV and 531.9 eV (Figure b).…”

“…Therefore, the introduction of the Ce ions into SnO 2 results in generation of oxygen vacancies . These enormous oxygen vacancies enhanced the photocatalytic activities of Ce doped SnO 2 by slowing down the rate of e − ‐h recombination …”