Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses

Zhu, Meiping; Yao, Kui; Du, Ying; Hu, Qi; Zhang, Weili; Shao, Jianda

doi:10.1016/j.vacuum.2013.04.002

Cited by 3 publications

(1 citation statement)

References 19 publications

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“…Most of all, the thickness deviation during the fabrication process dominates the decrease in peak transmittance. 28) A thin film designed as a quarter wavelength of the target wavelength has a peak transmittance at target wavelength. However, as the thickness of the thin film increases, the central wavelength shifts red, and as it becomes thinner, it shifts blue.…”

Section: Poly-si/sio 2 Fabry-perot Filter By Rf Sputteringmentioning

confidence: 99%

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Lee,

Hwang,

Han

et al. 2024

Jpn. J. Appl. Phys.

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The relationship between the transmittance and FWHM of a Fabry-Perot filter for a nondispersive carbon dioxide (CO2) sensor was investigated as a function of the number of distributed Bragg reflector (DBR) pairs consisting poly-Si and SiO¬2 thin films. Given the significant prior research on the fabrication of high-performance Fabry-Perot filters, this study is focused on the relationship between the transmittance and FWHM that can be achieved by controlling the reflectance of the DBR pairs. Each layer of the filter was simulated adequately as the poly-Si and SiO2-based DBR pairs, and poly-Si and SiO2 were deposited on the soda–lime substrate by radio frequency sputtering and low-pressure chemical vapor deposition based on the simulation results. The fabricated filter showed a transmittance of 43.7% and FWHM of 125 nm at 4.26 µm. The NDIR CO2 sensor with Fabry-Perot filter showed enhanced selectivity to CH4 and CO compared with normalized CO2 response.

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Section: Poly-si/sio 2 Fabry-perot Filter By Rf Sputteringmentioning

confidence: 99%

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Lee,

Hwang,

Han

et al. 2024

Jpn. J. Appl. Phys.

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show abstract

Study on Brewster angle thin film polarizer using hafnia–silica mixture as high-refractive-index material

Zhu

Sun

et al. 2018

Opt. Eng.

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Study on Brewster angle thin film polarizer using hafnia-silica mixture as high refractive index material

Zhu

Sun

et al. 2017

Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers

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Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses

Cited by 3 publications

References 19 publications

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Study on Brewster angle thin film polarizer using hafnia–silica mixture as high-refractive-index material

Study on Brewster angle thin film polarizer using hafnia-silica mixture as high refractive index material

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Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses

Cited by 3 publications

References 19 publications

Design and fabrication of poly-Si/SiO2 Fabry–Perot filter for nondispersive IR CO2 sensors

Design and fabrication of poly-Si/SiO2 Fabry–Perot filter for nondispersive IR CO2 sensors

Study on Brewster angle thin film polarizer using hafnia–silica mixture as high-refractive-index material

Study on Brewster angle thin film polarizer using hafnia-silica mixture as high refractive index material

Contact Info

Product

Resources

About

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors

Design and fabrication of poly-Si/SiO₂ Fabry–Perot filter for nondispersive IR CO₂ sensors