Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates (PSS) wafer

Tapilouw, Abraham Mario; Chang, Yi-Wei; Yu, Long-Yo; Wang, Hau-Wei

doi:10.1117/12.2236874

Cited by 2 publications

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 4 illustrates this phenomenon for a two-wavelength interferometer using a simulation based on Fourier optics. The measurement distortions shown in Figure 4 are well known [35][36][37] and a number of practical methods for minimizing errors have been developed [38][39][40]. Figure 5 shows examples of a comparison of stylus profile measurements with optical interferometry results on roughness specimens.…”

Section:  mentioning

confidence: 99%

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Groot

Lega

et al. 2019

Applied Optical Metrology III

View full text Add to dashboard Cite

Interferometers for the measurement of surface form and texture have a reputation for high performance. However, the results for many types of surface features can deviate from the expectation of one cycle of phase shift per half wavelength of surface height. Here we review the fundamentals of imaging interferometry and describe ways of defining instrument response, including the linear instrument transfer function. These considerations define practical regimes of linear behavior that are usually satisfied for traditional uses of interferometers; but that are increasingly challenged by applications involving complex textures and high surface slopes. We conclude by proposing pathways for further improving performance on difficult surface structures using advanced modeling techniques.

show abstract

Section:  mentioning

confidence: 99%

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Groot

Lega

et al. 2019

Applied Optical Metrology III

View full text Add to dashboard Cite

show abstract

A Review of Optical Interferometry for High-Precision Length Measurement

Huang,

Cui,

Lei

et al. 2024

Micromachines

View full text Add to dashboard Cite

Optical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on grating and laser interferometries. For grating interferometry, systems configurations ranging from single-degree- to multi-degree-of-freedom are introduced. For laser interferometry, different measurement methods are presented and compared according to their respective characteristics, including homodyne, heterodyne, white light interferometry, etc. With the rise of the optical frequency comb, its unique spectral properties have greatly expanded the length measurement capabilities of laser interferometry, achieving an unprecedented leap in both measurement range and accuracy. With regard to discussion on enhancement of measurement precision, special attention is given to periodic nonlinear errors and phase demodulation methods. This review offers insights into current challenges and potential future directions for improving interferometric measurement systems, and also emphasizes the role of innovative technologies in advancing precision metrology technology.

show abstract

Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates (PSS) wafer

Cited by 2 publications

References 8 publications

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

A Review of Optical Interferometry for High-Precision Length Measurement

Contact Info

Product

Resources

About