“…In this way, it is possible to correct reference theoretical accelerations along MEMS axes in equations ( 1)-( 3), into a x , a y , a z of equations ( 5)- (7), where a x',syst , a y',syst , a z',syst and φ x',syst , φ y',syst , φ z',syst are, respectively, the amplitudes and the phase differences, with respect to the reference signal a ref , of the spurious components along x'-, y'-and z'-axis. The amplitude of spurious components is, as average, around 10% of the reference acceleration.…”