2016
DOI: 10.1109/ted.2016.2563662
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Reduction of Kink Effect of Poly-Si TFT With Bottom Field Plate by Dispersing Current Density Technique

Abstract: A new multiple-gate poly-Si thin-film transistor (TFT) with a bottom field plate (FP) is proposed. The FP disperses the high current density away from the top corner of the spacer channel with the highest electric field, leading to an improved kink effect. Moreover, owing to an inversion layer induced by the FP at the bottom region of spacer poly-Si channel, a higher on-state current is achieved. In addition, the electric field near drain area is reduced, leading to a lower off-state current. Overall, the new … Show more

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Cited by 6 publications
(2 citation statements)
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“…[1][2][3][4][5][6] Compared with amorphous silicon TFTs, LTPS TFTs have demonstrated higher mobility, [7][8][9] which could be further improved by adopting advanced fabrication techniques such as the use of a high-k material, patterning, and various structures. [10][11][12][13][14][15][16][17][18] However, as TFTs have been scaled down, the adverse effects of the inherent grain boundary (GB) on electrical characteristics and their reliability have become significant. [19][20][21][22] To mitigate GB effects in polycrystalline silicon (poly-Si) channel TFTs, several methods such as plasma treatment, control of grain growth direction, and adjustment of GB location in poly-Si channels have been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6] Compared with amorphous silicon TFTs, LTPS TFTs have demonstrated higher mobility, [7][8][9] which could be further improved by adopting advanced fabrication techniques such as the use of a high-k material, patterning, and various structures. [10][11][12][13][14][15][16][17][18] However, as TFTs have been scaled down, the adverse effects of the inherent grain boundary (GB) on electrical characteristics and their reliability have become significant. [19][20][21][22] To mitigate GB effects in polycrystalline silicon (poly-Si) channel TFTs, several methods such as plasma treatment, control of grain growth direction, and adjustment of GB location in poly-Si channels have been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…Numerous structural improvements have been proposed to supress kink effect, including: field plates [ 35,36 ] ; lightly doped drain (LDD) [ 37 ] ; gate overlapped LDD (GOLDD) [ 38,39 ] ; asymmetric fingered polysilicon [ 31 ] ; and extended LDD. [ 16 ] Aside from such optimizations, contact‐controlled architectures, such as the source‐gated transistor [ 40–42 ] (SGT, Figure 1b,c, Supporting Information), have the ability to supress the kink effect when designed correctly.…”
Section: Introductionmentioning
confidence: 99%