Refinements on the Diffusion into the Underlying Silicon of Dopants Implanted in a Silicide Layer

Sinder, M.

doi:10.1002/(sici)1521-396x(199807)168:1<231::aid-pssa231>3.0.co;2-8

phys. stat. sol. (a)

1998

DOI: 10.1002/(sici)1521-396x(199807)168:1<231::aid-pssa231>3.0.co;2-8

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Refinements on the Diffusion into the Underlying Silicon of Dopants Implanted in a Silicide Layer

M. Sinder

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Refinements on the Diffusion into the Underlying Silicon of Dopants Implanted in a Silicide Layer

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References 16 publications

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