Reflecting Coatings for the Extreme Ultraviolet*

Hass, G.; Tousey, R.

doi:10.1364/josa.49.000593

Cited by 152 publications

(33 citation statements)

References 7 publications

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“…This is about the most that has been done with a single-dispersion system, and it was accomplished with the aid of selectively reflecting surfaces. The diffraction grating was coated, first with a thin film of germanium, and then with aluminum oxide with both thicknesses controlled in such a manner that an interference minimum of nearly zero reflectance occurred at 4000 A where the effective maximum of the stray light seemed to lie (HASS and TOUSEY, 1959). Aluminum oxide, however, is opaque in the extreme ultraviolet and has a reflectance of the order of 15 % from 1500 A to 584 A.…”

Section: Instrumentationmentioning

confidence: 99%

“…From longer wavelengths to about 1100 A, high reflectance coatings are now available. A mirror produced by vacuum deposition of aluminum followed, before removal from the vacuum, with a layer of magnesium fluoride 250 A thick, has a reflectance decreasing from near 90 ~ at 2000 A to 80 ~ at Lyman alpha, and 50 ~o at 1100 A (HAss and TOUSEY, 1959). With two such coatings, as employed in the doubledispersion spectrograph, the reflectance is still of the order of 50 ~ to 1200 A.…”

Section: Production Of Stigmatic Spectramentioning

confidence: 99%

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The extreme ultraviolet spectrum of the sun

Tousey

1963

Space Sci Rev

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175

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The present state of knowledge of the spectrum of the sun from 3000 ~ to 170 A. is critically reviewed. The characteristics of the different photographic and photoelectric spectroscopic instruments and the results are summarized and compared. Topics covered are line identifications, intensities, the continuum and its origin, the sun's surface in Lyman alpha, the profiles of H and K of Mg II, Lyman alpha and beta, and monitoring work conducted from rockets and satellites, including OSO-I.

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Section: Instrumentationmentioning

confidence: 99%

Section: Production Of Stigmatic Spectramentioning

confidence: 99%

The extreme ultraviolet spectrum of the sun

Tousey

1963

Space Sci Rev

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175

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“…The reflectance of electropolished gold coatings may reach 12% in the applied VUV range [27]; the efficiency of the electrochemical approach presented here is assumed to be below this value. It was speculated that a substantial increase of the surface reflectivity was attainable with an Al/MgF 2 double layer coating, which according to Hass and Tousey may reach up to 80% at 120 nm [28]. Unfortunately, an attempt with physical vapor deposition (PVD) of 200 nm and 25 nm thick layers of aluminum and MgF 2 , respectively, did not lead to the expected reflectivity increase.…”

Section: Iteration #Ivmentioning

confidence: 99%

Design Study of an Atmospheric Pressure Photoionization Interface for GC-MS

Kersten

Kroll

Haberer

et al. 2016

J. Am. Soc. Mass Spectrom.

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Abstract. This contribution reports on the development of an atmospheric pressure photoionization (APPI) source interfacing a gas chromatograph (GC) with a benchtop Orbitrap high resolution mass spectrometer (MS). We present efforts on method development aiming at high temperature stability (325°C), constant low impurity levels upon prolonged source operation, and efficient reaction volume irradiation combined with minimum peak broadening. The performance throughout each iterative development step was carefully assessed. The final GC-APPI-MS setup demonstrated femtogram-on-column sensitivity and chromatographic peaks of Gaussian shape with base peak widths <2 s for even the highest boiling compounds present in different EPA standard mixtures.

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“…Then, we present novel narrowband multilayers developed for the long EUV. Finally, enhanced-reflectance multilayers based on the superposition of absorbing materials are described.The reflective coatings of Al protected with MgF 2 , both materials deposited by thermal evaporation, have been the best established coating of FUV for over 40 years [3] . They can be prepared with a reflectance above 80% at wavelengths longer than ∼120 nm.…”

mentioning

confidence: 99%

“…The reflective coatings of Al protected with MgF 2 , both materials deposited by thermal evaporation, have been the best established coating of FUV for over 40 years [3] . They can be prepared with a reflectance above 80% at wavelengths longer than ∼120 nm.…”

mentioning

confidence: 99%

用于实际光学系统景深延拓的Fisher信息量优化孔径相位板研究

et al. 2010

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The strong absorption of materials in the extreme ultraviolet (EUV) above ∼50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of materials with moderate absorption, such as various lanthanides. Based on this research, novel multilayers based on Yb, Al, and SiO have been developed with a narrowband performance in the 50-92 nm range. Furthermore, procedures for the design of multi-material multilayers with absorbing materials have been derived, which resulted in multilayers with enhanced reflectance.OCIS codes: 230.4170 , 260.7200, 340.7470, 350.6090, 220.3740. doi: 10.3788 EUV and, to some extent, FUV have been lacking efficient coatings, with both broadband and narrowband performance, because the overwhelming part of materials is burdened with a strong absorption above ∼50 nm. Hence, single-layer coatings (sometimes coated with a protective overlayer) are often used.The standard coatings that can be prepared at GOLD include: broadband reflective coatings for the EUV, such as sputter-deposited SiC; broadband reflective coatings for the FUV, such as Al protected with MgF 2 . narrowband transmittance filters for the FUV based on multilayers of Al and MgF 2 .In addition to these, GOLD has been investigated on novel coatings for the EUV-FUV, including narrowband multilayers tuned in the difficult 50-92-nm range based on Al and Yb, Al/MgF2/SiC broadband reflective coatings that retain the high EUV reflectance of SiC with an enhanced reflectance above 105 nm.An important part of GOLD research has been devoted to the characterization of materials in the EUV-FUV, i.e., to measuring the optical constants n (refractive index) and k (extinction coefficient) of materials in this range. This research has provided GOLD with an extensive knowledge on the optical properties of materials in this range, which has given rise to the development of some novel coatingsThe deposition techniques available at GOLD are evaporation (filaments and electron beam) and ion beam sputtering (IBS). These techniques can be combined to deposit multilayer alternating films in deposition chambers that work under ultrahigh vacuum, which enable the coating deposition of reactive materials. The system combining evaporation and ion beam sputtering is connected via a vacuum to a reflectometer covering the range of 12-200 nm. The reflectometer-deposition system has been described [1,2] . Here, research on multilayer coatings for the EUV-FUV is reported. Some examples of the performance of standard coatings are presented firstly. Then, we present novel narrowband multilayers developed for the long EUV. Finally, enhanced-reflectance multilayers based on the superposition of absorbing materials are described.The reflective coatings of Al protected with MgF 2 , both materials deposited by thermal evaporation, have been the best established coating of FUV for over 40 years [3] . They can be prepared with a...

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Reflecting Coatings for the Extreme Ultraviolet*

Cited by 152 publications

References 7 publications

The extreme ultraviolet spectrum of the sun

The extreme ultraviolet spectrum of the sun

Design Study of an Atmospheric Pressure Photoionization Interface for GC-MS

用于实际光学系统景深延拓的Fisher信息量优化孔径相位板研究

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