1998
DOI: 10.1116/1.589976
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Reflection high-energy electron diffraction during substrate rotation: A new dimension forin situcharacterization

Abstract: Articles you may be interested inReflection high-energy electron diffraction and scanning tunneling microscopy study of InP (001) We present two methods to access reciprocal space with reflection high-energy electron diffraction ͑RHEED͒ during substrate rotation. The extraction of an arbitrary number of still frames from a continuously changing RHEED pattern is realized by triggering the substrate rotation and it allows analysis of quasistatic RHEED patterns that are updated every revolution. At the same time… Show more

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Cited by 35 publications
(21 citation statements)
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“…Azimuthal RHEED scans [20] were collected to determine the growth orientation. An example of such a pattern, taken from the films grown at 450 1C, is shown in the inset of Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Azimuthal RHEED scans [20] were collected to determine the growth orientation. An example of such a pattern, taken from the films grown at 450 1C, is shown in the inset of Fig.…”
Section: Resultsmentioning
confidence: 99%
“…A detailed description of the measurement principle can be found in Refs. [29,30]. In the current azimuthal scan, we record the intensity along a line parallel to the shadow edge through the 404 spot while the substrate rotates.…”
Section: Surface Structure Of the Epitaxial Filmmentioning
confidence: 99%
“…The transformation of the RHEED intensity distribution from the φ-scan requires the refined intensity convertion procedure, as well as sufficiently good φ-scan experimental conditions. It has been carried out by Braun [15] in two dimensions, for instance. Here, we have transformed the RHEED intensities in three dimensions.…”
Section: Introductionmentioning
confidence: 99%