Reflection type heterodyne grating interferometry for in-plane displacement measurement

Hsu, Cheng Chih; Wu, Chao-Hsin; Lee, Ju Yi; Chen, Hui Yi; Weng, Han Fu

doi:10.1016/j.optcom.2007.12.098

Cited by 41 publications

(11 citation statements)

References 11 publications

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“…To achieve the high resolution positioning, the sensing methods of position sensor become more important and have attracted great attention over the past two decades. In this section, we will introduce a few of typical precision positioning methods [24][25][26][27][28][29][30] which used heterodyne interferometry. C. C. Hsu [29] proposed the grating heterodyne interferometry (GHI) to measure the inplane displacement.…”

Section: Accurate Positioning With Heterodyne Interferometermentioning

confidence: 99%

The Applications of the Heterodyne Interferoemetry

Hsu¹

2012

Interferometry - Research and Applications in Science and Technology

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Section: Accurate Positioning With Heterodyne Interferometermentioning

confidence: 99%

The Applications of the Heterodyne Interferoemetry

Hsu¹

2012

Interferometry - Research and Applications in Science and Technology

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“…A heterodyne light source, as mentioned above, is partially reflected by the beam splitter BS 1 and is then received by photodetector D r . The output of photodetector D r is regarded as the reference signal and can be expressed in the form of I r = 1 + cosωt [12,14]. The expanded heterodyne light is then focused on the reflective grating, and the shearing interference beam is divided into transmitted and reflected beams by a beam splitter BS 2 .…”

Section: Displacement Measurement and Control Of The Gratingmentioning

confidence: 99%

“…For example, A. Teimel [10] proposed a grating interferometer with polarization elements, where the displacement of the grating was determined by the phase quadrature signals. Hsu et al [12] developed a grating interferometer which achieved a resolution of 0.5 nm. Zhou et.…”

Section: Introductionmentioning

confidence: 99%

Optical heterodyne grating shearing interferometry for long-range positioning applications

Lee

2011

Optics Communications

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“…To achieve high resolution positioning, the displacements of such stages must be acquired for feedback control of the stage position, which is one of the most important factors influencing the stage performance. Many kinds of sensors have been designed to measure the displacements of stages, such as capacitance transducers and laser interferometers [1]. Optical heterodyne interferometers and grating interferometers are commonly used for displacement sensing in the feedback control system [2].…”

Section: Introductionmentioning

confidence: 99%

Micro-displacement reconstruction using a laser self-mixing grating interferometer with multiple-diffraction

Guo¹,

Shi²,

Yu³

et al. 2017

Opt. Express

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In this paper, we demonstrated an improved laser self-mixing grating interferometer (SMGI) with autocollimation design which can avoid the disturbance from the light feedback of the zero-order diffraction beam. In order to obtain higher optical subdivision, SMGI with multiple-diffraction is implemented. Both theoretical analysis and experimental work show that the proposed system for displacement measurement can achieve high sensitivity and low measurement uncertainty. Using the proposed system, different forms of micro-displacement signals applied on the target (grating) have been reconstructed with accuracy of a few nanometers. The work presented in this paper provides a good way to achieve robust and high precision measurement with compact system configuration. Disciplines Engineering | Science and Technology Studies Abstract:In this paper, we demonstrated an improved laser self-mixing grating interferometer (SMGI) with auto-collimation design which can avoid the disturbance from the light feedback of the zero-order diffraction beam. In order to obtain higher optical subdivision, SMGI with multiple-diffraction is implemented. Both theoretical analysis and experimental work show that the proposed system for displacement measurement can achieve high sensitivity and low measurement uncertainty. Using the proposed system, different forms of micro-displacement signals applied on the target (grating) have been reconstructed with accuracy of a few nanometers. The work presented in this paper provides a good way to achieve robust and high precision measurement with compact system configuration. 4550-4556 (2011). 19. T. Bosch and S. Donati, "Optical feedback interferometry for sensing application," Opt. Eng. 40(1), 20-27 (2001). 20. W. Xia, M. Wang, Z. Yang, W. Guo, H. Hao, and D. Guo, "High-accuracy sinusoidal phase-modulating selfmixing interferometer using an electro-optic modulator: development and evaluation," Appl. Opt. 52(4), B52-B59 (2013).

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Reflection type heterodyne grating interferometry for in-plane displacement measurement

Cited by 41 publications

References 11 publications

The Applications of the Heterodyne Interferoemetry

The Applications of the Heterodyne Interferoemetry

Optical heterodyne grating shearing interferometry for long-range positioning applications

Micro-displacement reconstruction using a laser self-mixing grating interferometer with multiple-diffraction

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