2007
DOI: 10.1007/s10762-006-9150-3
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Reflective Infrared Ellipsometry of Plastic Films

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Cited by 11 publications
(14 citation statements)
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“…Infrared spectroscopic ellipsometry of polystyrene films has been reported previously, and the real and imaginary optical constants are available for quantitative comparison. Folks et al 27,28 give the values of the imaginary index for polystyrene to be 0.0371 and 0.0609 at the wavelengths of Fig. 3, making our estimates of the index using the simplified method just given in error by À6% and À7%, respectively, for the bands at 2923.6 cm À1 and 1492.7 cm À1 .…”
Section: Resultsmentioning
confidence: 98%
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“…Infrared spectroscopic ellipsometry of polystyrene films has been reported previously, and the real and imaginary optical constants are available for quantitative comparison. Folks et al 27,28 give the values of the imaginary index for polystyrene to be 0.0371 and 0.0609 at the wavelengths of Fig. 3, making our estimates of the index using the simplified method just given in error by À6% and À7%, respectively, for the bands at 2923.6 cm À1 and 1492.7 cm À1 .…”
Section: Resultsmentioning
confidence: 98%
“…A useful view of these data can be obtained by normalizing each spectrum (the Fig. 4 spectrum and the ''spectrum'' determined by Folk et al) 27,28 to the 2923.6 cm À1 absorption band. Figure 5 shows a plot of the ratios of intensities of seven major absorption bands, the ratio being defined as the normalized intensity of the band in Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…1 Introduction In this article infrared reflective ellipsometry (refl-SE) [1,2] is used to determine room temperature optical constants in the infrared for a variety of common materials used in micro-electronic device fabrication. There are many excellent texts which review the fundamentals of the technique [3,4].…”
mentioning
confidence: 99%
“…[37,38], Refs. [39,40], and Refs. [41,42], accordingly, whereas for glycerol, oscillator models extracted from Ref.…”
Section: Theoretical Formalismmentioning
confidence: 99%