2010
DOI: 10.3390/s101210863
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Reflectively Coupled Waveguide Photodetector for High Speed Optical Interconnection

Abstract: To fully utilize GaAs high drift mobility, techniques to monolithically integrate In0.53Ga0.47As p-i-n photodetectors with GaAs based optical waveguides using total internal reflection coupling are reviewed. Metal coplanar waveguides, deposited on top of the polyimide layer for the photodetector’s planarization and passivation, were then uniquely connected as a bridge between the photonics and electronics to illustrate the high-speed monitoring function. The photodetectors were efficiently implemented and impo… Show more

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Cited by 9 publications
(6 citation statements)
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“…Photodetectors, as a converter from optical signal into electrical signal, possess wide applications in various fields: image sensing, optical communication, safety/environmental monitoring, chemical/biological detection, and so on. [1][2][3][4][5][6][7][8][9][10][11] The photodetectors based on a variety of inorganic photoactive materials generally show excellent performances, for example, fast response speed, high gain-bandwidth product, and high stability. [12][13][14][15][16] The commercial photo-detection market is dominated by inorganic photodetectors prepared with silicon (Si), germanium (Ge), or their compounds.…”
Section: Introductionmentioning
confidence: 99%
“…Photodetectors, as a converter from optical signal into electrical signal, possess wide applications in various fields: image sensing, optical communication, safety/environmental monitoring, chemical/biological detection, and so on. [1][2][3][4][5][6][7][8][9][10][11] The photodetectors based on a variety of inorganic photoactive materials generally show excellent performances, for example, fast response speed, high gain-bandwidth product, and high stability. [12][13][14][15][16] The commercial photo-detection market is dominated by inorganic photodetectors prepared with silicon (Si), germanium (Ge), or their compounds.…”
Section: Introductionmentioning
confidence: 99%
“…Up to now, there have been many original and review articles devoted to nanostructured materials and set-ups used in photodetectors, these include quantum-dots, [44][45][46][47] quantum-well, [48][49][50][51] 1D nanostructures, [52][53][54][55] Ge-on-Si, 56 ZnO, 57 organic thin-film, 58 Si, 59 lnP, 60 wide-bandgap semiconductors for ultraviolet light detection, 61 gaseous 62 and other kinds. [63][64][65][66][67] However, there have been a very few comprehensive reviews focusing on a variety of solutionprocessed techniques used for inorganic nanofilm photodetector fabrication. This critical review highlights a selection of important topics pertinent to this field over the last 5 years.…”
Section: Introductionmentioning
confidence: 99%
“…GaAs possesses high electron mobility (8500 cm 2 V −1 s −1 ), good thermal characteristics (conductivity 0.55 W cm −1 °C−1 , diffusivity 0.31 cm 2 s −1 , linear expansion 5.73 × 10 −6 °C−1 ) and a zinc blende configuration. 49,50 Optical sensitivity in the near-infrared region, along with the stable crystal structure make GaAs ideal for many optoelectronic [51][52][53] and photovoltaic 54,55 devices, including near-IR photodetectors 31,56 and optical waveguides [57][58][59][60] operating at high enough temperatures to generate thermal carriers. The fabrication of GaAs nanoscale structures is regularly achieved with wet or dry etch techniques; however, there are advantages to MacEtch processing of GaAs for specific applications.…”
Section: Gaasmentioning
confidence: 99%