2007 Quantum Electronics and Laser Science Conference 2007
DOI: 10.1109/qels.2007.4431503
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Refractive Gauss-to-Tophat beam shapers improve structure quality and speed in micro-machining

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Cited by 3 publications
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“…For example, depending on the thin film material property or deposition technique, sometimes cracks or lifting of the material can occur at the scribe edges. To improve the quality of scribes and to increase throughput of the process, advantages of using flattop beam shape instead of fundamental Gaussian beam shape have been discussed in the literatures [2]. Figure 1 illustrates the differences between Gaussian and flattop beam fluence distributions as they relate to thin film ablation.…”
Section: Laser Beam Shape Comparisonmentioning
confidence: 99%
“…For example, depending on the thin film material property or deposition technique, sometimes cracks or lifting of the material can occur at the scribe edges. To improve the quality of scribes and to increase throughput of the process, advantages of using flattop beam shape instead of fundamental Gaussian beam shape have been discussed in the literatures [2]. Figure 1 illustrates the differences between Gaussian and flattop beam fluence distributions as they relate to thin film ablation.…”
Section: Laser Beam Shape Comparisonmentioning
confidence: 99%
“…Several studies have shown that the use of so-called Top-Hat beam profiles with uniform energy distribution can improve process quality and efficiency, especially in thin-film ablation processing [3,4,5,6]. When a Gaussian beam profile is used, the intensity below the ablation threshold does not contribute to the laser process.…”
Section: Introductionmentioning
confidence: 99%
“…It can be absorbed, leading to unwanted heating of the material. With the more homogeneous intensity distribution of the Top-Hat profile, more energy is contributed to the ablation process, leading to less heating of the material and thus providing higher efficiency in the ablation process [3,4,5]. A further advantage of the Top-Hat profiles is given by the lower sensitivity of the ablated spot diameter to variations of pulse energy in comparison using Gaussian beams, leading to a more stable laser process [3].…”
Section: Introductionmentioning
confidence: 99%
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