2015
DOI: 10.1364/ao.54.007007
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Registering functional defects into periodic holographic structures

Abstract: In this paper, we present two methods for registering desired defect lattices within background periodic lattices through spatial light-modulator-based holographic lithography. In the first method, the diffraction efficiency from the engineered phase pattern was used to locally modify the fill fraction of polymerized materials in holographic structures, and, at the same time, we achieved the lattice matching between modified and background regions. In the second method, we registered spatially variant lattices… Show more

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Cited by 3 publications
(3 citation statements)
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“…They are optical UV lithography, direct UV laser writing, electron-beam lithography, focused ion beam, and multiexposure holography. Above all, electronbeam lithography and dry-etching techniques offer remarkable resolution of fabrication of PC based devices [24,25]. In addition, technology could support fabricating the device with nm resolution.…”
Section: Simulation Results and Discussionmentioning
confidence: 99%
“…They are optical UV lithography, direct UV laser writing, electron-beam lithography, focused ion beam, and multiexposure holography. Above all, electronbeam lithography and dry-etching techniques offer remarkable resolution of fabrication of PC based devices [24,25]. In addition, technology could support fabricating the device with nm resolution.…”
Section: Simulation Results and Discussionmentioning
confidence: 99%
“…Recently, spatial light modulators (SLMs) have been used to engineer the phases of interfering beams through computer generated holograms to fabricate various photonic structures, such as quasi-periodic [ 24 , 25 ], periodic [ 25 , 26 , 27 ], multi-periodic [ 28 ], and chiral photonic structures [ 29 ]. Several methods have been used to incorporate desired functional defects into the PhC lattice through SLM-based holographic lithography [ 23 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 ]. Pioneering works using SLM as a masks or an adaptive optical element have demonstrated the formation of complex point and line defects and zigzag waveguides in PhC [ 23 , 41 ].…”
Section: Introductionmentioning
confidence: 99%
“…Gradient photonic lattices can be generated through spatially varying pixel-by-pixel phase engineering of phase patterns [ 34 ], or through production of hexagonal lattice wave fields with a gradient basis [ 35 ]. Spatially variant photonic crystal lattices have been fabricated with the SLM using an innovative synthesis approach that calculates the structure of the lattice while varying lattice orientation, lattice spacing, and filling fraction [ 36 , 37 , 38 , 39 , 40 ]. Although these methods were successful for the fabrication of functional PhCs using an SLM, arbitrary designs of phase patterns can result in an assignment of several gray levels on a single pixel, thus having a super-lattice effect.…”
Section: Introductionmentioning
confidence: 99%