2007
DOI: 10.1007/s00339-007-4172-9
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Regular hexagonal MoS2 microflakes grown from MoO3 precursor

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Cited by 16 publications
(17 citation statements)
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“…23, 39, 40 An excellent review of the current state of the art can be found in Chhowalla et al . 15 In a typical vapor-phase process (Fig.…”
Section: Fabrication Methods Processing and Exposure Potentialmentioning
confidence: 99%
“…23, 39, 40 An excellent review of the current state of the art can be found in Chhowalla et al . 15 In a typical vapor-phase process (Fig.…”
Section: Fabrication Methods Processing and Exposure Potentialmentioning
confidence: 99%
“…The large-area growth of highly uniform MoS 2 will enable the batch fabrication of atomically thin devices and circuitry. Currently, most works start with solid state precursors of molybdenum, such as MoO 3 [46,47] or Mo [48]. If the Mo precursors are not vaporized in the process, often the technique is also called sulfurization [46][47][48].…”
Section: Chemical Vapor Deposition (Cvd)mentioning
confidence: 99%
“…Currently, most works start with solid state precursors of molybdenum, such as MoO 3 [46,47] or Mo [48]. If the Mo precursors are not vaporized in the process, often the technique is also called sulfurization [46][47][48]. Typical S precursors are H 2 S gas [49] or vaporized S [46][47][48]50].…”
Section: Chemical Vapor Deposition (Cvd)mentioning
confidence: 99%
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