2019
DOI: 10.1016/j.surfcoat.2018.06.042
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Regulating the uniformity of DLC films in ECR plasma with negative substrate biasing

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Cited by 9 publications
(2 citation statements)
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“…Raman spectroscopy, as a widespread and nondestructive method, was applied to analyze the intricate carbon structure of the DLC films. There is a broad peak around 1500 cm −1 for amorphous carbon films in Raman spectrum, and two Gaussian peaks corresponding to 1550 (G peak) and 1350 cm −1 (D peak) can be obtained by calculating and fitting 22 . The integral ratio of D peak to G peak ( I D / I G ) is closely related to the relative content of sp 2 ‐C and sp 3 ‐C in amorphous carbon films 11,23 .…”
Section: Resultsmentioning
confidence: 99%
“…Raman spectroscopy, as a widespread and nondestructive method, was applied to analyze the intricate carbon structure of the DLC films. There is a broad peak around 1500 cm −1 for amorphous carbon films in Raman spectrum, and two Gaussian peaks corresponding to 1550 (G peak) and 1350 cm −1 (D peak) can be obtained by calculating and fitting 22 . The integral ratio of D peak to G peak ( I D / I G ) is closely related to the relative content of sp 2 ‐C and sp 3 ‐C in amorphous carbon films 11,23 .…”
Section: Resultsmentioning
confidence: 99%
“…Diamond-like carbon (DLC) coating represents an amorphous structure combined with sp 2 and sp 3 carbon bonds with a minimal presence of sp 1 bonds [5]. Consequently, these coatings exhibit properties of graphite and diamond.…”
Section: Introductionmentioning
confidence: 99%