2003
DOI: 10.1063/1.1559411
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Relationship between charge distribution and its image by electrostatic force microscopy

Abstract: We shall demonstrate in this article that characterization of the charge distribution by electrostatic force microscopy is not straightforward: we will stress the important role played by the electrostatic images of the scanned charge distribution in the tip and by the operating mode in the formation of extra features in images obtained with this instrument. To illustrate this, we will describe two models that correspond to the scanning of small and extended charge distributions. These models will be compared … Show more

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Cited by 34 publications
(22 citation statements)
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“…Over the years, EFM has successfully performed characterizations on a variety of electrostatic phenomena such as surface potential 50 and doping concentration in semiconductors 51 . In addition, EFM has been used in more specific cases, some of which include imaging the voltage characteristics of working microelectronic devices and in charge injection and detection of localized charge in nanostructures 52 .…”
Section: ) Electric Force Microscopymentioning
confidence: 99%
“…Over the years, EFM has successfully performed characterizations on a variety of electrostatic phenomena such as surface potential 50 and doping concentration in semiconductors 51 . In addition, EFM has been used in more specific cases, some of which include imaging the voltage characteristics of working microelectronic devices and in charge injection and detection of localized charge in nanostructures 52 .…”
Section: ) Electric Force Microscopymentioning
confidence: 99%
“…This order of magnitude of charge spreading (see Fig. 2-a3) is typical of charge injection in a dielectric insulating layer (here the OTS and SiO 2 layers) and is due to a non-zero in-plane electric field induced by the tip during the injection [11]. In the case method B (Fig.…”
mentioning
confidence: 99%
“…The possibility to quantify stored charge density by EFM has been well documented [7][8][9]. However, recent studies provide a nuanced view of the EFM procedure, namely arguing its sensitivity to applied bias during the measurements and its accuracy limitation caused by image charge effects [10,11]. To overcome these adverse effects, KFM technique tended to be preferred as it directly provides potential measurements [12][13][14].…”
Section: Introductionmentioning
confidence: 98%