New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh 2 (3-R,5-R¢Pz) 4 ·2L (R = R¢ = CF 3 , L = H 2 O (1), CH 3 CN (2)) and Rh 2 (3-R,5-R¢Pz) 4 (R = R¢ = t Bu (3); R = CF 3 , R¢ = t Bu (4)) have been synthesized from the interaction of the lithium salt of the corresponding pyrazole with Rh 2 (OAc) 4 in diethyl ether. The complexes were characterized by X-ray crystallography and spectroscopic methods. They were further evaluated as precursors for the chemical vapor deposition (CVD) of Rh thin films using H 2 as the carrier gas. The resulting films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).