The effect of interfacial interactions on the initial growth of Cu on clean SiO 2 and 3mercaptopropyltrimethoxysilane (MPTMS)-modified SiO 2 substrates by sputter deposition was studied using transmission electron microscopy, energy dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy. Plasma damage during sputter deposition makes surfaces of MPTMS-modified SiO 2 substrates consist of small MPTMS islands several tens of nanometers in diameter and bare SiO 2 areas. These MPTMS islands are composed of disordered multilayer MPTMS aggregates. The initial growth behavior of Cu on MPTMS-modified SiO 2 substrates differs from that on clean SiO 2 substrates, although Cu grows in 3D-island mode on both of them.After a 2.5-monolayer Cu deposition on clean SiO 2 substrates, spherical Cu particles were formed at a low number density of 1.3×10 16 /m 2 and at a long inter-particle distance of 5 nm. In contrast, after the same amount of deposition on MPTMS-modified SiO 2 substrates, Cu particles preferentially grow on MPTMS islands at a high number density of 3.9×10 16 /m 2 and at a short inter-particle distance of 3 nm, but do not grow on bare SiO 2 areas. The increased number density and the decreased inter-particle distance indicate that Cu has a lower mobility on MPTMS islands on MPTMS-modified SiO 2 substrates than on clean SiO 2 substrates. This difference in Cu mobility is attributed to the enhanced interfacial interactions between Cu and S on MPTMS islands on MPTMS-modified SiO 2 substrates via the formation of Cu-S bonds, compared with the relatively weak interfacial interactions between Cu and Si or O on clean SiO 2 substrates.