1999
DOI: 10.1109/27.763048
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Relaxation of electron swarm energy distribution functions in time-varying fields

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Cited by 27 publications
(19 citation statements)
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“…Plasmas provide a basis to achieve many different processes by merely changing background gas, frequency, voltage, current or composition of the gas mixture. [3,5,6]. Amongst the most versatile and most generally used are the rf plasmas and having in mind the market of modern electronic devices they certainly have the largest share.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…Plasmas provide a basis to achieve many different processes by merely changing background gas, frequency, voltage, current or composition of the gas mixture. [3,5,6]. Amongst the most versatile and most generally used are the rf plasmas and having in mind the market of modern electronic devices they certainly have the largest share.…”
Section: Discussionmentioning
confidence: 99%
“…One could perhaps argue that tat that level of phenomenology and almost complete lack of fundamental understanding and theory he could not do much more. However, even in the present day plasmas are often described by similar methods and a special issue of IEEE Transactions on Plasma science has been initiated by Mark J. Kushner to publish short papers where images are worth a thousand words and have to meet esthetical criteria as well (one example of a paper form one of those issues is given in [6]). Tesla's images and drawings would have been perfect candidates for such publications.…”
Section: Rf Discharges and Breakdownmentioning
confidence: 99%
“…Our Monte Carlo simulation code, which had been described in great details elsewhere (Bzenic´et al, 1999;Petrovic´et al, 2002;Dujko et al, 2005), was used to calculate the vibrational excitation rate coefficients. We followed the spatiotemporal evolution of each electron through time steps in order to represent correctly the motion of electrons in external RF fields.…”
Section: Calculation Techniquementioning
confidence: 99%
“…The calculation of electron transport coefficients was performed using a well-tested Monte Carlo simulation code. 25,26) The code has performed extremely well on all available dc E, dc E Â B, and rf E Â B benchmarks. We distinguish between the real-space (bulk) and the velocityspace (flux) transport coefficients by taking into account the nonconservative nature of collisions.…”
Section: Monte Carlo Techniquementioning
confidence: 99%