2017
DOI: 10.1364/optica.4.001147
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Release-free silicon-on-insulator cavity optomechanics

Abstract: We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin properties. A photonic crystal cavity is designed to localize laser light near the fin and the mechanical motion is read out and modified by radiation pressure back-action. We expect devices and systems made from similar structures to enable co-integration of signal transduction and… Show more

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Cited by 29 publications
(26 citation statements)
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References 16 publications
(16 reference statements)
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“…where Σ opt (ω) = −ihG 2 |α| 2 (χ α (ω) − χ * α (−ω)) /m eff (36) and χ α (ω) = (i(∆ − ω) + κ/2) −1 is the optical resonance response function. The expression in equation 35 represents the response of a damped mechanical resonance that is modified by a "self-energy" term, Σ opt (ω), due to interaction with optical resonance. The real and imaginary parts of this self-energy cause an effective modification of the mechanical frequency and linewidth ω m and γ in .…”
Section: A2 Back-action On the Mechanical Modementioning
confidence: 99%
“…where Σ opt (ω) = −ihG 2 |α| 2 (χ α (ω) − χ * α (−ω)) /m eff (36) and χ α (ω) = (i(∆ − ω) + κ/2) −1 is the optical resonance response function. The expression in equation 35 represents the response of a damped mechanical resonance that is modified by a "self-energy" term, Σ opt (ω), due to interaction with optical resonance. The real and imaginary parts of this self-energy cause an effective modification of the mechanical frequency and linewidth ω m and γ in .…”
Section: A2 Back-action On the Mechanical Modementioning
confidence: 99%
“…This principle of separating device from bath ensures that the nanomechanical mode temperature is nearly independent of the SiN membrane material temperature, hence providing immunity to local self-heating effects of probe light absorbed by the membrane. Such self-heating effects are a dominant source of uncertainty and noise in quantum optomechanical thermometry [6] and other low temperature quantum optomechanics experiments [31].The thermal bath engineering technique that we have developed can be readily applied to different size and frequency scale of nanomechanical systems [7,32] to improve the accuracy of optomechanical temperature metrology. Our technique of exploiting acoustic radiation channels potentially provides a building block for quantum networks where information is acoustically transduced between coherently coupled quantum optomechanical systems.…”
Section: Heating Laser Cyclementioning
confidence: 99%
“…3. Consequently, they do not suffer mechanical radiation losses in the absence of disorder [20,27]. Mechanical modes of the structure can be understood in terms of waves in the sockets and waves in the core.…”
Section: Optomechanical Antennas For Silicon Photonicsmentioning
confidence: 99%