Release Property of HSQ Replica Mold Fabricated by Room Temperature Nanoimprinting with PDMS soft mold

In this study we demonstrate that organic radical photopolymerized resins hybridized with inorganic silica nanoparticles improve the mechanical strength of replica mold materials and that organic-inorganic hybridization prolongs mold lifetime independently of mold linewidth during step-and-repeat UV nanoimprinting over 100 cycles. Silica nanoparticles with polymerizable methacryloyl groups (NPMC) were added to 1,10-decanediol dimethacrylate (MC10) and diacrylate (AC10) base monomers to enhance the mechanical properties of the replica molds. Heterogeneous combination of polymerizable groups, such as AC10 and NPMC, maintained a fluidity suitable for molding in UV nanoimprinting, and enabled the preparation of hybrid replica materials with a high inorganic silica content of 56.9 wt% (37.0 vol%). Nanoindentation measurements revealed that the hybrid replica materials with 37.0 vol% silica showed a Young’s modulus of 4.4 GPa. Only the 45-nm-linewidth patterns of AC10-based replica molds without NPMC showed line-collapse defects after imprint cycle tests, while the 45- and 100-nm-linewidth shapes of the hybrid resin materials with NPMC remained intact after 128 step-and-repeat imprint cycles and nanoindentation measurements.

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Organic–Inorganic Hybrid Replica Molds with High Mechanical Strength for Step-and-Repeat Ultraviolet Nanoimprinting

Ito

Nakamura

Nakagawa

2020

Bulletin of the Chemical Society of Japan

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Infrared micropolarizer array fabricated using a reversal nanoimprint

et al. 2018

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Using a reversal nanoimprint and metal evaporation process, we fabricated a micropolarizer array for the 2.5-7 μm wavelength region. The micropolarizer array has a unique unit, which is composed of 2×3 arrays on an intrinsic silicon substrate. Each array consists of a 200 nm period bilayer Al grating in a 1.3 mm×1.3 mm aperture. The transmittance of transverse magnetic polarization of each array is greater than 65% in the 2.5-7 μm wavelength range, and the extinction ratio is over 35 dB in the 3-4 μm and 6-7 μm wavelength range. This fabricated micropolarizer array has lower costs and better compatibility with microfabrication processes.

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Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography

et al. 2019

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Release Property of HSQ Replica Mold Fabricated by Room Temperature Nanoimprinting with PDMS soft mold

Cited by 3 publications

References 10 publications

Organic–Inorganic Hybrid Replica Molds with High Mechanical Strength for Step-and-Repeat Ultraviolet Nanoimprinting

Organic–Inorganic Hybrid Replica Molds with High Mechanical Strength for Step-and-Repeat Ultraviolet Nanoimprinting

Infrared micropolarizer array fabricated using a reversal nanoimprint

Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography

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