Relevance of surface roughness to tungsten sputtering and carbon implantation

Bizyukov, Ivan; Krieger, K.; Azarenkov, N. A.; Toussaint, U. von

doi:10.1063/1.2400393

Cited by 23 publications

(26 citation statements)

References 14 publications

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“…For example, a good agreement between simulation and experiment has been observed in [4], where the implantation of C + ions in a tungsten surface has been investigated. The well-known TRIDYN code [5] has been used for simulation of erosion yields and depth profiles.…”

Section: Introductionmentioning

confidence: 80%

Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level

Mutzke

Bizyukov

Langhuth

et al. 2012

Nuclear Instruments and Methods in Physics Research Section B:

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A Si pitch grating has been exposed to a 6 keV C + ion beam at normal angle of incidence and at an angle of 42° parallel to the structure. Sputtering of the grating has been observed experimentally by Rutherford backscattering, the areal density of implanted C ions into the Si structure has been measured by nuclear reaction analysis. The bombardment has been simulated by the SDTrimSP-2D code at normal angle of incidence, as well as at angles of 42° parallel and perpendicular to the structure. The numerical simulations show reasonable agreement with experimental results. Significant differences in Si sputtering and implantation of C ions parallel and perpendicular to the structure indicate an anisotropy effect, which could not be observed in the 1D case.

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Section: Introductionmentioning

confidence: 80%

Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level

Mutzke

Bizyukov

Langhuth

et al. 2012

Nuclear Instruments and Methods in Physics Research Section B:

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“…The influence of surface roughness and surface cleanliness was quantified and minimized, and the effect of non-uniform bombardment was eliminated by replacing in-situ weight-loss measurements with in-situ ion beam analysis [7]. These improvements have allowed to achieve good quantitative agreement between experimental results and simulations in case of smooth surfaces.…”

Section: Introductionmentioning

confidence: 94%

“…This work discusses previously performed experiments [7] comparing the experimental data and SDTrimSP-2D simulations. In addition to data presented in [7], new data of the respective experiments obtained by atomic force microscopy became available.…”

Section: Introductionmentioning

confidence: 99%

Morphology and changes of elemental surface composition of tungsten bombarded with carbon ions

Bizyukov¹,

Mutzke

Schneider

et al. 2008

Nuclear Instruments and Methods in Physics Research Section B:

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Surface morphology has a strong influence on sputtering and implantation. A newly developed Monte-Carlo code SDTrimSP-2D simulates ion bombardment of surfaces with a 2D surface morphology (1D is depth and another dimension is lateral) defined by a vertical crosssection of the solid. The simulations allow to study numerically the interdependency of surface geometry and sputtering and implantation processes. Experimental results of the bombardment of W layers deposited on polished pyrolitic graphite with 6 keV C ions were used for comparison with results of the simulation. Free parameters of the code, particularly the so-called anisotropy coefficient, are calibrated by comparison of the macroscopic evolution of the elemental surface composition to the experimental results. After calibration, the code reproduces qualitatively the evolution of the shape of nano-scale surface structures observed by atomic force microscopy and by scanning electron microscopy. The histograms of the surface heights obtained by measurements and by the simulation show qualitative agreement. Local values of the W sputtering yield and C areal density, which are accessible only from the simulations, have been found to be strongly dependent on the nano-scale geometry.

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“…This effect is enhanced due to the large weight difference between W and C. These problems have been overcome by using in situ ion-beam analysis of the irradiated surface with an analysis beam cross-section of ≈1 mm 2 , so that the corresponding fluence distribution in the analysed area is sufficiently uniform. As an example, the evolution of the mixed surface, derived from Rutherford Back-Scattering (RBS) and Bayesian analysis, is shown in Figure 1 [17]. One can see that the depth of C implantation remains the same at fluence <0.44×10 22 m -2 .…”

Section: Interaction Of C + With W At Room Temperature (Rt)mentioning

confidence: 99%

“…Using these relations, the results of the local measurements can be expressed in the form of implantation-sputtering curves for each species [17]. The evolution of the surface composition under ion bombardment, expressed by such an implantation-sputtering curve, depends only on properties of the surface and projectile atoms, and on the kinematic parameters of the incident ions.…”

Section: Interaction Of C + With W At Room Temperature (Rt)mentioning

confidence: 99%

An overview of sputtering-related processes occurring at mixed surfaces formed by simultaneous C+ and D+ irradiation of W

Bizyukov

Krieger

Lee

et al. 2012

Journal of Nuclear Materials

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This paper reviews the interaction of carbon and deuterium ions with tungsten leading to the formation of mixed W-C-D surfaces. This projectile-target system is prone to synergistic effects, which are dependent on the presence of both projectile species. The erosion of the surface is governed by both kinematic effects and effects related to elevated surface temperature. It is found that the kinematics can be well described by available models of ionsurface interactions based on binary-collision approximations. The temperature-dependent processes include: chemical erosion, diffusion, erosion at elevated temperatures and radiation-enhanced sublimation. The effects of these processes, in particular their influence on the carbon content of the mixed W-C surface, have been studied experimentally. These experimental results and their implications for fusion applications are discussed here.2

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Relevance of surface roughness to tungsten sputtering and carbon implantation

Cited by 23 publications

References 14 publications

Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level

Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level

Morphology and changes of elemental surface composition of tungsten bombarded with carbon ions

An overview of sputtering-related processes occurring at mixed surfaces formed by simultaneous C+ and D+ irradiation of W

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