2016
DOI: 10.1016/j.snb.2015.10.092
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Reliability and selectivity of H2 sensors composed of Pd Film nanogaps on an elastomeric substrate

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Cited by 43 publications
(19 citation statements)
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“…Figure 4b shows how a partially suspended Pd structure relieves the stress compared with a fully anchored Pd structure in a mechanical simulation. There was also an attempt to create a high‐sensitivity sensor by utilizing volume expansion through the application of specific nanomaterial structures 83,84,195–199. When nanogaps are manufactured in an aligned and controlled form with consideration of volume expansion depending on the concentration of H 2 , a switch‐type H 2 sensor could be produced (Figure 4c,d).…”
Section: High‐performance Sensors Using Geometrically Structured Nanomentioning
confidence: 99%
“…Figure 4b shows how a partially suspended Pd structure relieves the stress compared with a fully anchored Pd structure in a mechanical simulation. There was also an attempt to create a high‐sensitivity sensor by utilizing volume expansion through the application of specific nanomaterial structures 83,84,195–199. When nanogaps are manufactured in an aligned and controlled form with consideration of volume expansion depending on the concentration of H 2 , a switch‐type H 2 sensor could be produced (Figure 4c,d).…”
Section: High‐performance Sensors Using Geometrically Structured Nanomentioning
confidence: 99%
“…Until now, several types of materials have been used to develop sensitive films. These include polymers [3,4] metal oxides [5,6], and composite materials [7,8,9]. Each of these types of materials can improve the sensibility of the film, but by using composite materials we can obtain both new material properties and improved properties.…”
Section: Introductionmentioning
confidence: 99%
“…As thin films for hydrogen detection, palladium is noted for its ability to dissociate the hydrogen molecule [9]. Also, oxidic films [5], as well as composite films [17,18,19] are often used in the development of hydrogen sensors.…”
Section: Introductionmentioning
confidence: 99%
“…Основная проблема при создании газовых сенсоров на гибких подложках связана с разработкой технологии получения материала газочувствительного слоя. В качестве таких материалов предлагается использовать углеродные нанотрубки [10], слои графена и оксида графена [11], проводящие полимеры [12], металлооксиды [13] и некоторые металлы [14]. Все они обладают собственными характерными достоинствами и недостатками, и в зависимости от конкретного детектируемого газа и условий эксплуатации конечного устройства целесообразным представляется использование того или иного материала.…”
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