2014
DOI: 10.7567/jjap.53.04ep12
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Reliability study of thermal cycling stress on smart power devices

Abstract: In this paper, we describe a smart power device degradation behavior under thermal cycling stress. An innovative test structure was developed, which faithfully reflects a stress state caused by the smart power device during operation. From our experiment, the device degraded after millions of fast thermal cycling pulses. We discovered that via destruction was the cause of the device degradation. For the duration of thermal cycling stress, the via resistance increased gradually, and finally increased rapidly at… Show more

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Cited by 5 publications
(1 citation statement)
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“…When considering thin film specimens, especially structured ones, as in microelectronics applications, focused ion beam (FIB) is a widely used preparation technique for investigating general defects, including voids [23][24][25][26]. Compared to embedded mechanical cross-sections, FIB has the advantage that no time-consuming pre-preparation steps are required and that imaging is also possible between different milling steps, allowing for tomographic void analyses [27].…”
Section: Introductionmentioning
confidence: 99%
“…When considering thin film specimens, especially structured ones, as in microelectronics applications, focused ion beam (FIB) is a widely used preparation technique for investigating general defects, including voids [23][24][25][26]. Compared to embedded mechanical cross-sections, FIB has the advantage that no time-consuming pre-preparation steps are required and that imaging is also possible between different milling steps, allowing for tomographic void analyses [27].…”
Section: Introductionmentioning
confidence: 99%