Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors

Mu, Gengyang; Snell, Nikaya; Zhang, Chang; Xie, Xitong; Tahvildari, Radin; Weck, Arnaud; Godin, Michel; St-Gelais, Raphaël

doi:10.1109/jmems.2022.3228188

Cited by 3 publications

(3 citation statements)

References 26 publications

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“…[ 72 ] Remote actuation with on‐chip capacitors is recently shown as potential method to actuate the membrane structure. [ 73 ] Figure 7F demonstrates the measured resonance frequency of MoS 2 as a function of the gate voltage, with an estimated built‐in strain of ≈10 –3 [ 72 ] Joule heating has been utilized to tune the frequency of MoS 2 up to 123%V −1 . [ 74 ] Fringing electrostatic fields have been also used to control the bi‐stability and tune the enhance the frequency sensitivity.…”

Section: Fundamentals Of Micro‐machined Resonant Sensorsmentioning

confidence: 99%

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Dinh,

Rais‐Zadeh,

Nguyen

et al. 2023

Adv Materials Technologies

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Driving a micro and nanomechanical structure to resonance and observing its resonant motion in the physical world have led to numerous fundamental discoveries in physics, sciences, chemistry, biology, and engineering, as well as device commercialization. Scaling down mechanical structures from micrometric to nanometric size has enabled the utilization of resonant motions to probe material properties and various dynamical phenomena in quantum coherence and squeezing. Recent advances in material sciences and nanofabrication resulted in successful demonstration of ultra‐high frequency operation (GHz range) and ultra‐high quality factor (10 billion) micromachined mechanical resonators (MMRs). The resonant motion of these structures has been utilized as an indispensable tool to weigh biological and chemical species at resolution of atomic mass unit, sense a force as small as zepto‐newton, and to detect numerous other physical parameters. Here, a systematic view on the resonant sensing transduction is provided, underlying physics, and sensing structures realized with micro/nano‐electromechanical systems (MEMS/NEMS) technologies. It is also describe the roles of nanomaterials and structures, nano‐fabrication and rational designs on the resonance frequency and quality factor of MMRs toward high‐performance sensing. This paper discusses the most recent advances in the development of MMRs for material characterization as well as biological, chemical, and physical sensing. Finally, the paper discusses the challenges and perspectives on design, fabrication, and developments of resonant sensors with high quality factor toward quantum sensing, and ultra‐high sensitivity and resolution for classical sensing applications.

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Section: Fundamentals Of Micro‐machined Resonant Sensorsmentioning

confidence: 99%

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Dinh,

Rais‐Zadeh,

Nguyen

et al. 2023

Adv Materials Technologies

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“…To measure the near-field radiation signal, we rely on a low-stress SiN membrane (built-in stress ∼60 MPa, inferred from the mechanical resonance eigenfrequencies) with nominal dimensions of 1.7 mm in side length and t SiN = 100 nm thickness. The SiN membrane used in this platform was fabricated in-house, but comparable devices are available commercially. , The temperature of the membrane is inferred in real time through an optical interferometer , that measures shifts of the membrane mechanical resonance frequency due to thermally induced stress relaxation (i.e., material expansion). , The membrane resonance frequency is tracked by phase locking (PLL) the internal oscillator of a lock-in amplifier (Zurich Instrument MFLI) to the membrane eigenfrequency . The lock-in oscillator signal (set to an amplitude of 80 mV) is sent to a piece of piezoelectric ceramic (Thorlabs shear piezoelectric chip, PN:PL5FBP3) that actuates the membrane at its resonance frequency by acoustic coupling through the membrane-chip mount.…”

mentioning

confidence: 99%

“…To measure the near-field radiation signal, we rely on a lowstress SiN membrane (built-in stress ∼60 MPa, inferred from the mechanical resonance eigenfrequencies) with nominal dimensions of 1.7 mm in side length and t SiN = 100 nm thickness. The SiN membrane used in this platform was fabricated in-house, 64 but comparable devices are available commercially. 55,56 The temperature of the membrane is inferred in real time through an optical interferometer 54,65 that measures shifts of the membrane mechanical resonance frequency due to thermally induced stress relaxation (i.e., material expansion).…”

mentioning

confidence: 99%

Measurement of Near-Field Radiative Heat Transfer at Deep Sub-Wavelength Distances using Nanomechanical Resonators

Giroux,

Stephan,

Brazeau

et al. 2023

Nano Lett.

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Near-field radiative heat transfer (NFRHT) measurements often rely on custom microdevices that can be difficult to reproduce after their original demonstration. Here we study NFRHT using plain silicon nitride (SiN) membrane nanomechanical resonatorsa widely available substrate used in applications such as electron microscopy and optomechanicsand on which other materials can easily be deposited. We report measurements down to a minimal distance of 180 nm between a large radius of curvature (15.5 mm) glass radiator and a SiN membrane resonator. At such deep sub-wavelength distance, heat transfer is dominated by surface polariton resonances over a (0.25 mm)2 effective area, which is comparable to plane–plane experiments employing custom microfabricated devices. We also discuss how measurements using nanomechanical resonators create opportunities for simultaneously measuring near-field radiative heat transfer and thermal radiation forces (e.g., thermal corrections to Casimir forces).

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High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators

Zhang,

Yalavarthi,

Giroux

et al. 2024

APL Photonics

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We achieve high detectivity terahertz radiation sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a balance between the frequency stability of the resonator and its responsivity to absorbed radiation. Using this approach, we demonstrate a detectivity D*≈3.4×109cm⋅Hz/W and a noise equivalent power NEP≈36pW/Hz that outperform the best room-temperature on-chip THz detectors, such as pyroelectric detectors, while maintaining a comparable thermal response time of ≈200 ms. Our optical absorber consists of a 1-mm diameter metasurface, which currently enables a 0.5–3 THz detection range but can easily be scaled to other frequencies in the THz and infrared ranges. In addition to demonstrating high-performance terahertz radiation sensing, our work unveils an important fundamental trade-off between frequency stability and responsivity in thermal-based nanomechanical radiation sensors.

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Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors

Cited by 3 publications

References 26 publications

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Measurement of Near-Field Radiative Heat Transfer at Deep Sub-Wavelength Distances using Nanomechanical Resonators

High detectivity terahertz radiation sensing using frequency-noise-optimized nanomechanical resonators

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