Based on the Monte Carlo (MC) simulation, the film growth and magnetic properties of Ni (100) films are investigated. The simulated results indicate that the surface roughness of the Ni films drops with the increase of the substrate temperature and the decrease of the deposition rate. The Curie temperature Tc is greatly influenced by the surface roughness and size of Ni films. Moreover, it is found that the Curie temperatures of the films are related to the mean coordination number Z and the surface roughness r. The simulated results explain the experimental facts well.