Replication of an UV-NIL stamp using DLC coating

Kim, Ki-don; Jeong, Jun‐Ho; Ali, Altun; Lee, Dong-Il; Choi, Dae‐Geun; Lee, Eung-Sug

doi:10.1016/j.mee.2007.01.042

Cited by 7 publications

(3 citation statements)

References 9 publications

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“…In nanoinjection molding, the pattern quality was affected by the melt and mold temperature but the pattern height was only affected by the mold temperature [10]. The nanopattern is influenced by the injection velocity depending on the injected materials [12]. Since effects of injection and packing pressure were insignificant, it was fixed as the maximum value in this study.…”

Section: Resultsmentioning

confidence: 99%

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Nanopattern insert molding

2010

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A new method was investigated to produce nanopatterns on polymeric surfaces with high resolution, good productivity, and low cost. It has certain advantages when compared with such conventional techniques as nanoimprint lithography (NIL), hot embossing, and injection molding. Polyvinyl alcohol (PVA) was utilized for preparation of the stamp with nanopatterns on its surface. The nanoimprinted PVA film was inserted into the cavity and the polymer melt was injected into the mold. Nanopatterns with pillars smaller than 100 nm were produced on the polymeric surface. The water soluble PVA film was used as the inserted template to overcome the difficulties of releasing the nanopatterned film from the substrate.

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Section: Resultsmentioning

confidence: 99%

“…It was dried in vacuum and heated on a hot plate for 6 h at 60 • C to obtain a PVA template film. The negative PVA template films with the thickness of about 100 and 200 µm were peeled off from the first polycarbonate replica and cut into rectangular slabs of 50 mm × 50 mm [12,13].…”

Section: Fabrication Of Nanopatterned Pva Filmmentioning

confidence: 99%

Nanopattern insert molding

2010

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“…DLC film can reduce the adhesion and friction forces, due its low surface energy and it is also resistant to wear [26]. DLC films can readily be deposited on mold materials such as Si, quartz, and even polymeric film using chemical vapor deposition (CVD) for thermal and UV NIL [27][28][29][30]. DLC film can be coated on the mold patterns, and nanoscale patterns can be fabricated directly on the DLC surface.…”

Section: Methods For Controlling the Adhesion Energymentioning

confidence: 99%

Tribology issues in nanoimprint lithography

Kim

Lee

et al. 2010

J Mech Sci Technol

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Nanoimprint lithography (NIL) is one of the most promising technologies for nanofabrication because it can create nano-and microscale structures and devices in a cost-effective manner. In the NIL process, a mold with patterns on its surface comes in contact with a polymer film on a substrate. The patterns are transferred to the polymer film and then the mold is separated from the film. Mechanical contact between the mold and the polymer film, and between the film and the substrate, is inevitable. In some cases, during the separation process, adhesion and friction forces at the interfaces can deform and fracture the transferred patterns and detach the polymer film from the substrate. Thus, controlling the adhesion and friction between the materials in contact is very important in achieving a successful pattern transfer and making the NIL process a robust nanofabrication technique. Many theoretical and experimental research efforts have been made to clarify the tribological phenomena in NIL and to reduce defects due to adhesion and friction. This article describes the tribological problems encountered and reviews the related research.

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