2012
DOI: 10.1088/0960-1317/22/6/065019
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Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert

Abstract: Abstract. The development of MEMS and Microsystems needs a reliable massproduction process to fabricate micro components with micro/nano scale features. In our study, we used the micro injection molding process to replicate micro/nano scale channels and ridges from a Bulk Metallic Glass (BMG) cavity insert. High density polyethylene (HDPE) was used as the molding material and Design of Experiment (DOE) was adopted to systematically and statistically investigate the relationship between machine parameters, real… Show more

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Cited by 82 publications
(71 citation statements)
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“…The smallest feature can reach 85nm and was well replicated by the microinjection molding process using HDPE. Such patterns present aspect ratio dependent replication and lower aspect ratio regions have better filling than high aspect ratio regions, which is related to polymer flow resistant and local heat transfer [22]. Here we demonstrate a multi-scale mold fabricated by using FIB milling and FIB deposition, which provides an efficient method to fabricate nano-scale testing channels for DNA operations.…”
Section: Bmg Insertmentioning
confidence: 95%
“…The smallest feature can reach 85nm and was well replicated by the microinjection molding process using HDPE. Such patterns present aspect ratio dependent replication and lower aspect ratio regions have better filling than high aspect ratio regions, which is related to polymer flow resistant and local heat transfer [22]. Here we demonstrate a multi-scale mold fabricated by using FIB milling and FIB deposition, which provides an efficient method to fabricate nano-scale testing channels for DNA operations.…”
Section: Bmg Insertmentioning
confidence: 95%
“…In response to the trend for miniaturization of devices, products and components in the medical, optical and telecommunication industries, microinjection molding has been developed successfully as a mass production technology for small, high precision, high value-added products [1][2][3]. Microinjection molding involves two typical products: micro components weighing a few milligrams or large parts having micro/nano scale surface features.…”
Section: Introductionmentioning
confidence: 99%
“…MEMS and Microsystems (MST) technologies are creating a huge market for micro components and parts with micro/nano scale features [1]- [3], such as micro gears and microfluidic devices. Micro injection molding is a key enabling fabrication technology for mass production of polymer micro components.…”
Section: Introductionmentioning
confidence: 99%
“…Using this optimization, we measured the thermo-rheological behavior of polymer melt with two combined PT sensors. By using a Bulk Metallic Glass (BMG) mold insert, we successfully replicated a series of micron and submicron scale features [2], [3]. Based on process and rheological characterization, we can now propose process based quality control strategies for replicating micro/nano features.…”
Section: Introductionmentioning
confidence: 99%