Resealable, ultra-low leak micro valve using liquid surface tension sealing for vacuum applications

Yang, Chenye; Xie, Xin; Liu, Sanaci; Livermore, Carol

doi:10.1109/transducers.2017.7994481

Cited by 5 publications

(3 citation statements)

References 6 publications

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“…Piezoelectric extensional actuators are not able to provide as large of a displacement as bending actuators, but with some motion amplification mechanisms, they can be compact and still efficient. Piezoelectric extension actuators and MEMS technology are also increasingly being leveraged to create tactile displays, as in [62][63][64][65][66][67][68][69][70]. Important challenges nonetheless remain, including spatial resolution, refresh rate, fabrication complexity, and cost.…”

Section: Piezoelectric Extensional Actuatorsmentioning

confidence: 99%

A Review of Smart Materials in Tactile Actuators for Information Delivery

Xie

Liu

Yang

et al. 2017

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As the largest organ in the human body, the skin provides the important sensory channel for humans to receive external stimulations based on touch. By the information perceived through touch, people can feel and guess the properties of objects, like weight, temperature, textures, and motion, etc. In fact, those properties are nerve stimuli to our brain received by different kinds of receptors in the skin. Mechanical, electrical, and thermal stimuli can stimulate these receptors and cause different information to be conveyed through the nerves. Technologies for actuators to provide mechanical, electrical or thermal stimuli have been developed. These include static or vibrational actuation, electrostatic stimulation, focused ultrasound, and more. Smart materials, such as piezoelectric materials, carbon nanotubes, and shape memory alloys, play important roles in providing actuation for tactile sensation. This paper aims to review the background biological knowledge of human tactile sensing, to give an understanding of how we sense and interact with the world through the sense of touch, as well as the conventional and state-of-the-art technologies of tactile actuators for tactile feedback delivery.

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Section: Piezoelectric Extensional Actuatorsmentioning

confidence: 99%

A Review of Smart Materials in Tactile Actuators for Information Delivery

Xie

Liu

Yang

et al. 2017

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“…Liu et al researched a pneumatic control method of a novel electromagnetic microvalve based on microchamber air pressure to improve controlling precision in microfluidic chips [26]. Based on liquid surface tension sealing of the molten solder, Yang et al proposed a resealable, ultra low-leak microvalve for vacuum applications [27]. Tahvildari et al demonstrated a microfluidic device which consisted of multiple microvalves and an array of nanopores, and the device could realize the precise manipulation of fluidic and electrical access to various regions of the embedded silicon nitride (Si-N) membrane [28].…”

Section: Introductionmentioning

confidence: 99%

Actuation Mechanism of Microvalves: A Review

2020

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The microvalve is one of the most important components in microfluidics. With decades of development, the microvalve has been widely used in many industries such as life science, chemical engineering, chip, and so forth. This paper presents a comprehensive review of the progress made over the past years about microvalves based on different actuation mechanisms. According to driving sources, plenty of actuation mechanisms are developed and adopted in microvalves, including electricity, magnetism, gas, material and creature, surface acoustic wave, and so on. Although there are currently a variety of microvalves, problems such as leakage, low precision, poor reliability, high energy consumption, and high cost still exist. Problems deserving to be further addressed are suggested, aimed at materials, fabrication methods, controlling performances, flow characteristics, and applications.

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“…Based on the fracture mechanics, the influence of the different prefabricated crack widths and lengths on the failure of the specimen was studied. Finally, the correction coefficient λ of the crack width and the critical hydraulic pressure Pc were deduced [21][22][23].…”

Section: Introductionmentioning

confidence: 99%

Test and Analysis of Hydraulic Fracture Characteristics of Rock Single Crack

Xu¹,

Xie²,

Yang³

et al. 2017

Fluid Mech Open Acc

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Hydraulic fracture can often cause serious disasters, of which the hydraulic fracturing of a single crack is one of the common styles. In the paper, the damage mechanics of the hydraulic fracture are revealed by the hydraulic fracture experiment of the single crack. Mortar is used as a similar material to rock mass, and the hydraulic fracture characteristics experiment was carried out. The hydraulic pressure Pini and the change in water pressure inside the crack were studied. The critical water pressure Pc and the failure mode of the specimen were analyzed under different working conditions. Based on the experiment, the expression for the correction coefficient of the crack width λ and the failure of the critical water pressure Pc were obtained.

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Resealable, ultra-low leak micro valve using liquid surface tension sealing for vacuum applications

Cited by 5 publications

References 6 publications

A Review of Smart Materials in Tactile Actuators for Information Delivery

A Review of Smart Materials in Tactile Actuators for Information Delivery

Actuation Mechanism of Microvalves: A Review

Test and Analysis of Hydraulic Fracture Characteristics of Rock Single Crack

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