Research and Simulation of MEMS Polycrystalline Silicon Resonance Mass Beam Sensor

Abstract

The corresponding development of resonance mass beam pressure sensor in decades is introduced and a serial of theory analysis is executed. The advantages and disadvantages are studied on the resonance mass pressure sensor. Through the finite element analysis software ANSYS, the stress and strain distribution situation is obtained in this paper. Under the outside overload pressure situation, we find that the linearity of the resonance mass beam pressure sensor presents a declining situation, but in a small range. From the total performances of sensor, it still keeps a good condition. Under the 260 times of rang pressure, the sensor chip deformation is only 14.5um, which is a kind of very small deformation situation. That is to say the resonance polycrystalline silicon mass beam sensor designed here has a high reliability under the outside overload pressure situation.

A probe-type high-precision micro-force sensor based on quartz DETF resonator

“…Although the theoretical design of the resonant force sensor is more difficult than other kinds of sensors and the manufacturing process is more demanding, it is advanced in technology. The excellent performance advantage of the resonant force sensor is considered by global scholars as a new type of device that can replace other products in the field of precision measurement [19]. Een-wood et al first proposed a resonant MEMS force sensor with a butterfly-shaped structure [20].…”